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Chemical vapour deposition of superconductors

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Abstract

Chemical vapour deposition processes (CVD) can produce metastable fine-grained materials as well as epitaxial coatings and can have a very large throwing power depending on the process parameters. Therefore, CVD is an prospective method to deposit high-temperature superconducting materials withT c⩾10 K. One of the first superconductors which were produced was Nb3Sn on tapes and single wires. This superconducting material is, however, today produced by metallurgical methods. Since the detection of Nb3Ge, CVD has become for these coatings the main method of production for the following reasons: high deposition rates, possibility to dope the material by addition of further doping gases to the CVD-process, continuous process. These coatings were deposited on tapes. For the first time the large throwing power of the CVD process was utilized for the deposition of B1 -NbC x N y , on carbon fibre bundles. This opens the possibility to produce multifilamentary structures used for magnetic applications. The structure of the coating can be varied by changing the gas properties, by addition of further gases, by an ultrasonic field, by ignition of a gas discharge and by multi-layering. CVD could also be a prospective method for producing the new class of superconductors withT c⩾30 K.

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References

  1. W. Heinz,IEEE Trans. Magn. Mag. 19 (1983) 167.

    Article  Google Scholar 

  2. G. Gamota,ibid. 7 (1981) 19.

    Article  Google Scholar 

  3. J. G. Bednorz andK. A. Müller,Z. Phys. B 64 (1986) 189.

    Article  CAS  Google Scholar 

  4. M. K. Wu, J. R. Ashburn, C. J. Torng, P. H. Hov, R. L. Meng, L. Gao, Z. J. Huang Y. Q. Wang, andC. W. Chu,Phys. Rev. Lett. 58 (1987) 908.

    Article  CAS  Google Scholar 

  5. Proceedings of the Conference on Low Temperature Physics,Jpn J. Appl. Phys. 26 (1987) Suppl. 26-3.

  6. K. Okuda, S. Nogudi, A. Yamagishi, K. Sugiyama andM. Date,ibid., p. 1171.

    CAS  Google Scholar 

  7. D. Dew-Hughes, in “Treatise on Materials Science Technoloty”, Vol. 14, “Metallurgy of Superconducting Materials,” edited by Th. Luhman and D. Dew-Hughes (Academic, New York, 1979) p. 137.

    Google Scholar 

  8. D. Dew Hughes andTh. Luhman (eds),ibid., p. 427.

  9. O. Henkel andE. M. Sawltzky, “Supraleitende Werkstoffe” (VEB-Verlag fur Grundstoffindustrie, Leipzig, 1982) p. 128.

    Google Scholar 

  10. G. Wahl andF. Schmaderer, in “Ceramics, Today and Tomorrow”, edited by Sh. Naka, N. Soga and Sh. Kume (The Ceramic Society of Japan, Tokyo, 1986) p. 165.

    Google Scholar 

  11. K. Noto, in Proceedings 9th International Conference on Magnet Technology, edited by C. Marinucci, P. Weymuth, Swiss Inst. for Nuclear Research (SIN) at ETH-Zürich, Zürich (1985) p. 199.

    Google Scholar 

  12. J. R. Gavaler,J. Vac. Sci. Technol. 18 (1981) 247.

    Article  CAS  Google Scholar 

  13. J. D. Livingston,Phys. Status Solidi (A) 44 (1977) 295.

    CAS  Google Scholar 

  14. M. N. Wilson, in “Superconducting Materials Science, Metallurgy, Fabrication and Application”, edited by S. Foner and B. B. Schwartz (Plenum, New York, 1981) p. 63.

    Google Scholar 

  15. R. A. Buhrman,Physica 126B (1984) 62.

    Google Scholar 

  16. W. Buckel, “Supraleitung” (Verlag Chemie, Weinheim, 1984).

    Google Scholar 

  17. R. F. Bunshah, J. M. Blocher, Th. D. Bonfield, J. G. Fish, P. B. Ghate, B. E. Jacobson, D. M. Mattox, G. E. McGuire, M. Schwartz, J. A. Thornton andR. C. Tucker, “Deposition Technologies for Films and Coatings” (Noyes Publications, Park Ridge, N.J., 1982).

    Google Scholar 

  18. C. F. Powell, J. H. Oxley andJ. M. Blocher, “Vapor Deposition” (Wiley, New York, 1966).

    Google Scholar 

  19. Last Conference: Proceedings of the International CVD Conference, X, edited by G. W. Cullen (The Electrochemical Society, Pennington, N.J., 1987).

    Google Scholar 

  20. Proceedings of the European CVD-Conferences, Last CVD-Conference Proceedings of Euro CVD VI, edited by R. Porat (Iscar Ltd., Israel, 1987).

    Google Scholar 

  21. M. J. Howes andD. V. Morgan (eds), “Gallium Arsenide: Materials, Devices and Circuits” (Wiley, Chichester, 1985).

    Google Scholar 

  22. J. B. Mullins, S. J. C. Irvine, R. H. Moss, P. N. Robson andO. R. Wright, “Metallorganic Vapour Phase Epitaxy 1984”, Proceedings the 2nd International Conference on MOCVD 1984,J. Cryst. Growth 68 (1984).

  23. M. V. Ardenne, “Tabellen der Elektronenphysik”, VolsI, II VEB (Deutscher Verlag der Wissenschaften, Berlin, Vol.I: 1962; vol.II. 1964).

    Google Scholar 

  24. G. Wahl,Thin Solid Films 40 (1977) 13.

    Article  CAS  Google Scholar 

  25. G. H. Evans andR. Greif, Sandia-Report, SAND (1986) 86-8843.

  26. Y. Kusumoto, T. Hayashi andS. Komiya,Jpn J. Appl. Phys. 24 (1985) 620.

    Article  CAS  Google Scholar 

  27. C. Houtman, D. B. Graves andKl. F. Jensen,J. Electrochem. Soc. 133 (1986) 961.

    CAS  Google Scholar 

  28. K. Chen andA. R. Mortazavi,J. Crystal Growth 77 (1986) 199.

    Article  Google Scholar 

  29. G. Wahl, F. Schmaderer, R. Huber andR. Weber, Proceedings VI Euro CVD-Conference, edited by R. Porat (Iscar Ltd., Israel, 1987) p. 176.

    Google Scholar 

  30. G. Wahl andP. Batzies, Proceedings IVth International CVD-Conference, edited by G. F. Wakefield, M. Blocher (ECS, Princeton, 1973) p. 425.

    Google Scholar 

  31. E. A. Moelwyn-Hughes, “Physical Chemistry” (Pergamon, Oxford, 1961).

    Google Scholar 

  32. A. N. Nesmeyanov, “Vapor Pressure of the Chemical Elements” (Elsevier, London, 1963).

    Google Scholar 

  33. R. Hultgren, P. Desai andD. Hawkins, “Selected Values of the thermodynamic Properties of the Elements” (ASM, Metals Park, Ohio, 1973).

    Google Scholar 

  34. E. J. Cukauskas, R. T. Holm, A. D. Berry andR. Kaplan, Appl. Superconductivity Conference, Baltimore, Maryland 9/28-103 (1986).

  35. E. J. Cukauskas, R. T. Holm, A. D. Berry, R. Kaplan andM. L. H. Green,IEEE Trans. Magn. Mag. 23 (1986) 999.

    Google Scholar 

  36. H. Pakrash,Prog. Cryst. Growth Charact. 9 (1984) 325.

    Article  Google Scholar 

  37. H. Suhr, Ch. Oehr, H. Holzschuh, F. Schmaderer, G. Wahl, Th. Kruck andA. Kinnen,Physica C153–155 (1988) 784.

    Google Scholar 

  38. J. J. Hanak, in “Metallurgy of Advanced Electronic Materials”, edited by G. E. Brock (Interscience, New York, 1963) p. 161.

    Google Scholar 

  39. J. J. Hanak, K. Strater andG. W. Cullen,RCA-Rev. XXV (1964) 342.

    Google Scholar 

  40. A. C. Prior,Cryogenics June (1967) 131.

  41. A. Echarri andM. Spadoni,ibid. (1971) 274.

  42. L. J. Vieland andA. W. Wicklund,Phys. Lett. 49A (1974) 407.

    CAS  Google Scholar 

  43. H. Kawamura andK. Tachikawa,ibid. 50A (1974) 29.

    CAS  Google Scholar 

  44. A. I. Braginski andG. W. Roland,Appl. Phys. Lett. 25 (1974) 762.

    Article  CAS  Google Scholar 

  45. J. R. Gavaler,ibid. 23 (1973) 480.

    Article  CAS  Google Scholar 

  46. F. Weiss, R. Madar, J. P. Senateur, C. Bernard andR. Fruchart,J. Crystal Growth 56 (1982) 423.

    Article  CAS  Google Scholar 

  47. O. Demolliens, F. Weiss, R. Madar, J. P. Senateur andR. Fruchart,Ann. de Chemie Fr. (1984) 959;O. Demolliens, Thesis, Institut National Polytechnique de Grenoble (June 1986).

  48. I. Ahmad, W. J. Hoffermann andD. U. Gubser,IEEE Trans. Magn. 13 (1977) 483.

    Article  Google Scholar 

  49. M. P. Maley, L. R. Newkirk, J. D. Thompson andF. A. Valencia,IEEE Trans. Magn. Mag. 17 (1981) 533.

    Article  Google Scholar 

  50. V. Cernusko, K. Fröhlich, M. Jergel, D. Machajedik, M. Tarnovska andV. K. Fedorov,J. Phys. C1 (1984) 429.

    Google Scholar 

  51. V. Cernusko, K. Fröhlich, D. Machajdik andM. Jergel,IEEE Trans. Magn. Mag. 17 (1981) 2051.

    Article  Google Scholar 

  52. A. Müller,Z. Metallkde 71 (1980) 507.

    Google Scholar 

  53. Idem, US Patent, 4336280 (1982).

  54. L. R. Newkirk, F. A. Valencia andT. C. Wallace,J. Electrochem. Soc. 123 (1976) 425.

    CAS  Google Scholar 

  55. F. Weiss, C. Bernard andR. Fruchart, Proceedings VIII International CVD Conference 1981, edited by J. Blocher, G. E. Vuillard and G. Wahl (ECS, Pennington, 1981) p. 44.

    Google Scholar 

  56. R. Madar, F. Weiss, R. Fruchart andC. Bernard,J. Crystal Growth 45 (1978) 37.

    Article  CAS  Google Scholar 

  57. A. I. Braginski, M. R. Daniel andC. W. Roland,AIP Conf. Proc. 34 (1976) 78.

    Article  CAS  Google Scholar 

  58. L. Li, B. Zhao, P. Zhons, S. Guo andY. Zhao,J. Low Temp. Phys. 45 (1981) 287.

    Article  CAS  Google Scholar 

  59. A. I. Braginski, J. R. Gavaler, G. W. Roland, M. R. Daniel, M. A. Janocko andA. A. Santhanam,IEEE Trans. Mag. Mag-13 (1977) 300.

    Article  Google Scholar 

  60. R. E. Enstrom, J. J. Hanak andG. W. Cullen,RCA Rev. 31 (1970) 702.

    CAS  Google Scholar 

  61. R. E. Enstrom andJ. R. Appert,J. Appl. Phys. 43 (1972) 1915.

    Article  CAS  Google Scholar 

  62. G. Ziegler, B. Blos, H. Diepers andK. Wohlleben,Z. Angew. Phys. 31 (1971) 184.

    CAS  Google Scholar 

  63. Y. Uzel andH. Diepers,Z. Phys. 258 (1973) 126.

    Article  CAS  Google Scholar 

  64. A. I. Braginski, G. W. Roland, M. R. Daniel, A. T. Santhanam andK. W. Guardipee,J. Appl. Phys. 49 (1978) 736.

    Article  CAS  Google Scholar 

  65. A. I. Braginski, G. W. Roland andA. T. Santhanam,IEEE Trans. Mag. Mag-15 (1979) 505.

    Article  CAS  Google Scholar 

  66. R. T. Kampwirth,ibid. Mag-15 (1979) 502.

    Article  CAS  Google Scholar 

  67. M. P. Maley, L. R. Newkirk, J. D. Thompson andF. A. Valencia, Final Report, EPRI-EL 965, Research Project 7855-1 (1979).

  68. J. W. Ekin,J. Appl. Phys. 54 (1983) 303.

    Article  CAS  Google Scholar 

  69. J. J. Hauser andH. C. Theuerer,Phys. Rev. 134 (1964) 1A 198.

    Article  Google Scholar 

  70. S. A. Alterovitz, E. J. Haugland andJ. A. Woolam,Phys. Rev. B 23 (1981) 4485.

    Article  CAS  Google Scholar 

  71. I. V. Petrusevic, L. A. Niselson, F. N. Kozlov, V. P. Bogoanov andV. V. Abramov,Izv. Akad. Nauk SSSR, Metally 3 (1974) 77.

    Google Scholar 

  72. J. J. Hauser andH. C. Theuerer,Phys. Rev. 129 (1963) 103.

    Article  CAS  Google Scholar 

  73. G. Webb andJ. Englehardt,IEEE Trans. Magn. Mag-11 (1975) 208.

    Article  Google Scholar 

  74. V. M. Pan, V. P. Alekseevskii, A. G. Popov, Yu. I. Beletskii, L. M. Yupko andV. V. Yarosh,JETP Lett. 21 228 (1975) cited after [8].

    Google Scholar 

  75. K. Togano, H. Kumakura, Y. Yoshida andK. Tachikawa,IEEE Trans. Magn. Mag-21 (1985) 463.

    Article  CAS  Google Scholar 

  76. K. Inoue, T. Kuroda andK. Tachikawa,ibid.,Mag-21 (1985) 467.

    Article  CAS  Google Scholar 

  77. H. Yamasaki andY. Kimura,Mat. Res. Bull. Vol. 21 (1986) 125.

    Article  CAS  Google Scholar 

  78. T. Togano andK. Tachikawa,Adv. in Cryogenic Engineering and Materials 34 (1987) 451.

    Google Scholar 

  79. C. L. H. Thieme, S. Pourrahimi, B. B. Schwartz andS. Foner,ibid.,44 (1984) 260.

    CAS  Google Scholar 

  80. M. Suzuki, T. Anayama, K. Watanabe, N. Toyota, N. Kobayashi, K. Noto andY. Muto,Jap. Journ. Appl. Phys. 24 (1985) L767.

    Article  CAS  Google Scholar 

  81. A. I. Braginski, J. R. Gavaler andG. W. Roland,IEEE Trans. Magn. Mag-13 (1977) 300.

    Article  Google Scholar 

  82. Th. Wolf, Physikalisches Institut der Universität Karlsruhe, Thesis, Karlsruhe (1982).

  83. Zhao You-Xian andHe Shou-An,Solid State Commun. 45 (1983) 281.

    Article  Google Scholar 

  84. G. Linker, R. Smithey andO. Meyer,J. Phys. F Met. Phys. 14 (1984) L115.

    Article  CAS  Google Scholar 

  85. B. M. Klein andW. E. Picket, in “Superconductivity in d- and f-band”, edited by W. Buckel and W. Weber (Kernforschungszentrum, Karlsruhe, 1982) p. 477.

    Google Scholar 

  86. W. L. McMillan,Phys. Rev. 167 (1968) 331.

    Article  CAS  Google Scholar 

  87. B. T. Matthias, E. Corenzwit, A. S. Cooper andL. O. Longinotti,Proc. Nat. Acad. Sci. 68 (1971) 56.

    CAS  Google Scholar 

  88. D. Dew-Hughes andR. Jones,Appl. Phys. Lett. 36 (1980) 856.

    Article  CAS  Google Scholar 

  89. J. W. Ekin,IEEE Trans. Magn. Mag-17 (1981) 658.

    Article  CAS  Google Scholar 

  90. J. W. Ekin, J. R. Gavaler andJ. Gregg,Appl. Phys. Lett. 41 (1982) 996.

    Article  CAS  Google Scholar 

  91. E. K. Storms,High Temp. Sci. 7 (1975) 391.

    Google Scholar 

  92. Idem, MTP Int. Rev. Sci. 10 (1972) 37.

    CAS  Google Scholar 

  93. R. W. Guard, J. W. Savage andD. G. Swarthout,Trans. AIME 239 (1967) 643.

    CAS  Google Scholar 

  94. G. E. Pike, H. O. Pierson, A. W. Mullendore andJ. E. Schirber,Appl. Polym. Symp. 29 (1976) 71.

    CAS  Google Scholar 

  95. N. Pessal andJ. K. Hulm,Physics 2 (1966) 311.

    Google Scholar 

  96. J. K. Hulm andB. T. Matthias, in “Superconductor Materials Science, Metallurgy, Fabrication and Applications”, edited by S. Foner and B. B. Schwarz (Plenum, New York, 1981) p. 1.

    Google Scholar 

  97. M. W. Williams, K. M. Ralls andM. R. Pickus,J. Phys. Chem. Sol. 28 (1967) 333.

    Article  CAS  Google Scholar 

  98. B. T. Matthias,Phys. Rev. 92 (1953) 874.

    Article  CAS  Google Scholar 

  99. Idem, ibid. 97 (1955) 74.

    Article  CAS  Google Scholar 

  100. J. R. Gavaler, A. I. Braginski, M. Ashkin andAt. Santhanam, in “Superconductivity in d- and f-Band Metals”, edited by H. Suhl and M. B. Maple (Academic, New York, 1980) p. 25.

    Google Scholar 

  101. J. R. Gavaler, A. T. Santhanam, A. I. Braginski, M. Ashkin andM. A. Anocko,IEEE Trans. Magn. Mag-17 (1981) 573.

    Article  CAS  Google Scholar 

  102. M. Dietrich andL. J. Paterok,Cryogenics 24 (1984) 636.

    Article  CAS  Google Scholar 

  103. W. D. Smith, R. Y. Lin andJ. Economy,Appl. Polym. Symp. 29 (1976) 83.

    CAS  Google Scholar 

  104. J. Economy, R. Y. Lin, W. D. Smith andC. K. Jun, Air France Materials Laboratory Report No. AFMLR-TR-72-189 (1972).

  105. M. C. Ohmer andW. G. D. Frederick,J. Appl. Phys. 45 (1974) 1382.

    Article  CAS  Google Scholar 

  106. K. Brennfleck, Thesis, Karlsruhe (1982).

  107. K. Brennfleck, M. Dietrich, E. Fitzer andD. Kehr, Proceedings 7th International CVD Conference, edited by Th. O. Sedgwick and H. Lydtin (ECS, Princeton, 1979) p. 300.

    Google Scholar 

  108. M. Dietrich, K. Brennfleck andE. Fitzer, Proceedings International CVD Conference, edited by J. M. Blocher, G. E. Vuillard and G. Wahl (ECS, Paris, 1981) p. 759.

    Google Scholar 

  109. M. Dietrich, C. H. Dustmann, F. Schmaderer andG. Wahl,IEEE Trans. Magn. Mag-19 (1983) 406.

    Article  CAS  Google Scholar 

  110. F. Schmaderer andG. Wahl, Proceedings Vth Euro CVD Conference on CVD, edited by J. O. Carlson and L. Lindström, (Uppsala Uni., Uppsala, 1985) p. 533.

    Google Scholar 

  111. T. Takahashi andH. Itoh,J. Crystal Growth 49 (1980) 445.

    Article  CAS  Google Scholar 

  112. S. Balduf, Diplomarbeit, Fachhochschule für Technik, Mannheim (1982) available from G. Wahl.

    Google Scholar 

  113. K. Brennfleck, E. Fitzer, G. Schoch andM. Dietrich, Proceedings IXth International CVD Conference, edited by McD. Robinson, C. H. J. v. d. Brekel, G. W. Cullen and J. M. Blocher (ECS, Pennington, 1984) p. 649.

    Google Scholar 

  114. K. Brennfleck, personal communication (1987).

  115. F. Schmaderer, G. Wahl, M. Dietrich, Proceedings IXth International CVD-Conference, edited by McD. Robinson, C. H. J. v. d. Brekel, G. W. Cullen, J. M. Blocher, (ECS, Pennington, 1984) p. 663.

    Google Scholar 

  116. G. Wahl andF. Schmaderer, in “Stromlose Beschichtung”, edited by A. F. Bogenschütz (Leuze Verlag, Saulgau, 1988) p. 124.

    Google Scholar 

  117. E. J. Kramer,J. Appl. Phys. 44 (1973) 1360.

    Article  CAS  Google Scholar 

  118. H. Yamane, H. Kurosawa, H. Iwasaki, H. Masumoto, T. Hirai, N. Kobayashi andY. Muto,Jap. Journ. Appl. Phys. 27 (1988) p. L 1275.

    CAS  Google Scholar 

  119. T. Nakamori, H. Abe, T. Kanamori andS. Shibata,Jap. Journ. Appl. Phys. 27 (1988) p. L 1265.

    CAS  Google Scholar 

  120. A. D. Berry, D. K. Gaskill, R. T. Holm, R. Kaplan andR. L. Henry,Appl. Phys. Lett. 52 (1988) 1743.

    Article  CAS  Google Scholar 

  121. F. Schmaderer andG. Wahl, to be published, 1989.

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Wahl, G., Schmaderer, F. Chemical vapour deposition of superconductors. J Mater Sci 24, 1141–1158 (1989). https://doi.org/10.1007/BF02397041

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