Abstract
A marriage of optical fibre fabrication technology and LSI microfabrication technology gave birth to fibre-matched silica waveguides on silicon: thick glass layers of high-silica-content glass are deposited on silicon by flame hydrolysis, a method originally developed for fibre preform fabrication. Silica channel waveguides are then formed by photolithographic pattern definition processes followed by reactive ion etching. This ‘high silica (HiS) technology’ offers the possibility of integrating a number of passive functions on a single silicon chip, as well as the possibility of the hybrid integration of both active and passive devices on silicon. This paper reviews the NTT HiS technology and its application to integrated-optic components such as optical beam splitters, optical switches, wavelength-division multi/demultiplexers and optical frequency-division multi/demultiplexers. The clear and simple waveguide structures produced by the HiS technology make it possible to design and fabricate these components with high precision and excellent reproducibility.
Similar content being viewed by others
References
K. ASATANI,J. Lightwave Technol 7 (1989) 1705.
D. B. KECK, A. J. MORROW, D. A. NOLAN and D. A. THOMPSON,J. Lightwave Technol. 7 (1989) 1623.
S. E. MILLER,Bell Syst. Techn. J. 48 (1969) 2059.
L. ROSS, N. FABRICIOUS and H. OESTE,Proc. EFOC/LAN'87, Switzerland, June 1989 p. 99.
M. SEKI, R. SUGAWARA, H. HASHIZUME and E. OKUDA,Proc. OFC'89, PD-4, Houston, February 1989.
C. NISSIN, A. BEGUIN, R. JANSEN and P. LABORDE,Proc. OFC'89, Houston, February 1989, p. 91.
M. KAWACHI, M. KOBAYASHI and T. MIYASHITA,Proc. ECOC'87 II, Helsinki, Sept, 1987, p. 53.
S. VALETTE, S. RENARD, H. DENIS, J. P. JADOT, A. FOUNIER, P. PHILIPPE, P. GIDON, A. M. GROUILLET and E. DESGRANGES,Solid State Technol. 32, 2 (1989) 69.
C. H. HENRY, G. E. BLONDER and R. F. KAZARINOV,J. Lighwave Technol.,7 (1989) 1530.
T. IZAWA, H. MORI, Y. MURAKAMI and N. SHIMIZU,Appl. Phys. Lett. 38 (1981) 483.
M. KAWACHI, M. YASU and T. EDAHIRO,Electron. Lett.,19 (1983) 583.
M. KAWACHI, M. YASU and M. KOBAYASHI,Jpn. J. Appl. Phys.,22 (1983) 1932.
B. H. VERBECK, C. H. HENRY, N. A. OLSSON, K. J. ORLOWSKY, R. F. KAZARIVOV and B. H. JOHNSON,J. Lightwave Technol.,6 (1988) 1011.
S. VALLETE,J. Modern Opt.,35 (1988) 993.
K. IMOTO, A. TAKAHIRO and H. SANO,Proc. ECOC'88, Brighton, Sept. 1988, p. 577.
N. A. NOURSHARGH, E. M. STARR and T. M. ONG,Electron. Lett. 25 (1989) 981.
R. KASHYAP, B. J. AINSLIE and G. D. MAXWELL,Electron. Lett. 25 (1989) 206.
T. BABA, Y. KOKUBUN and Y. MERA,Proc. IGWO'89, Houston, February 1989, p. 164.
F. S. HICKERNELL,Solid State Technol. 31, 11 (1988) 83.
N. TAKATO, M. YASU and M. KAWACHI,Electron. Lett.,22 (1986) 321.
N. TAKATO, K. JINGUJI, M. YASU, H. TOBA and M. KAWACHI,J. Lightwave Technol.,6 (1988) 1003.
T. MIYASHITA and M. NAKAHARA,Proc. IOOC'89, 18D1-1, Kobe, July 1989.
N. TAKATO, M. KAWACHI, M. NAKAHARA and T. MIYASHITA,Proc. SPIE 1177, Boston, 1989, p. 92.
A. HIMENO, M. KOBAYASHI and H. TERUI,Electron. Lett. 21 (1985) 1020.
Y. YAMADA, M. KAWACHI, M. YASU and M. KOBAYASHI,J. Lightwave Technol. 4 (1986) 277.
Y. OHMORI, T. KOMINATO, H. OKAZAKI and M. YASU,Proc. OFC'90, WE2, San Francisco, Jan. 1990.
Y. YAMADA, M. KAWACHI, M. YASU and M. KOBAYASHI,Electron. Lett. 20 (1984) 589.
Y. YAMADA and M. KOBAYASHI,J. Lightwave Technol. 5 (1987) 1716.
A. SUGITAet al., “Optical fibre connection to single-mode silica waveguides with fibre-guiding grooves,” to be published.
M. KAWACHI, N. TAKATO, K. JINGUJI and M. YASU,Proc. OFC/IOOC'87, TuQ31, Reno, Jan. 1987.
K. JINGUJI, N. TAKATO and M. KAWACHI,Tech. Dig. 1st Micro-optic Conf., D-7, Tokyo, Oct. 1987.
Y. SASAKI, T. HOSAKA and J. NODA,Electron. Lett. 20 (1984) 784.
M. YASU, K. JINGUJI, N. TAKATO and M. KAWACHI, “Silica-based channel waveguide on sapphire substrate,”1987 Natl. Conv. Rec. on Semicon. and Mat., IECE Jpn (1987) 373 (in Japanese).
N. TAKATO, Y. OTSUKA, K. JINGUJI, M. YASU and M. KAWACHI,Tech. Dig. 1st Opto-electronics Conf.,A3-3, Tokyo, 1986.
E. A. J. MARCATILI,Bell Syst. Tech. J. 48 (1969) 2071.
A. KUMAR, A. K. HAUL and A. K. CHATAK,Opt. Lett. 10 (1985) 86.
K. JINGUJI, N. TAKATO and M. KAWACHI,Proc. Tech. Group Meet. IECE Jpn., 1986, Japan (in Japanese).
M. HARUNA and H. KOYAMA,Proc. ECOC'83, Firenze, October 1983, p. 129.
M. KAWACHI, N. TAKATO, K. JINGUJI and A. SUGITA,Proc. CLEO'89, TuJ17, Baltimore, April 1989.
A. SUGITA, K. JINGUJI, N. TAKATO and M. KAWACHI,J. Lightware Technol. to be published.
M. KAWACHI, Y. YAMADA, M. YASU and M. KOBAYASHI,Electron. Lett. 21 (1985) 314.
H. TERUI, Y. YAMADA, M. KAWACHI and M. KOBAYASHI, 646.
M. KAWACHI, M. KOBAYASHI and T. MIYASHITA, Hybrid optical integration with high-silica channel waveguides on silicon, 2 inProc. IGWO'86, FDD5, Atlanta, February 1986.
S. SUMIDA, Y. YAMADA, M. YASU and M. KAWACHI,Trans. IECE. Jpn. E69 (1986) 352.
M. KOBAYASHI, M. YAMADA, Y. YAMADA, A. HIMENO and H. TERUI,Electron. Lett. 23 (1987) 143.
M. OKUNO, A. TAKAGI, M. YASU and N. TAKATO,Spring Natl. Conv. IECE. Jpn., 1989, C501 (in Japanese).
S. KOBAYASHI, T. KITO, M. YASU and M. KAWACHI,Fall Natl. Conv. IECE Jpn., 1989, C-265 (in Japanese).
T. SATAKE, N. KASHIMA and M. OKI,J. Lightwave Technol. 6 (1988) 269.
A. SUGITA, N. TAKATO, K. JINGUJI and M. KAWACHI,Proc. IOOC'89, 18D1-4, Kobe, July 1989.
H. TERUI, A. HIMENO, Y. YAMADA and M. KOBAYASHI,Proc. ECOC'87, Helsinki, September 1987 p. 243.
M. KAWACHI,Proc. CLEO'89, Baltimore, April 1989.
T. KOMINATO, M. YASU, N. TAKATO and M. KAWACHI,Trans. IECE. Jpn. J73-C-1, 5, p. 354.
K. INOUE, N. TAKATO, H. TOBA and M. KAWACHI,J. Lightwave Technol. 6 (1988) 339.
N. TAKATO, K. INOUE, K. JINGUJI, M. YASU, H. TOBA and M. KAWACHI,Proc. ECOC'86,WH2, Barcelona, September 1986.
H. TOBA, K. ODA, K. NOSU and N. TAKATO,Electron. Lett. 25 (1989) 574.
K. SASAYAMA, M. OKUNO and H. HABARA,Proc. IOOC'89, 20D2-5, Kobe, July 1989.
N. TAKATO, T. KOMINATO, H. TOBA, K. JINGUJI and M. KAWACHI,Proc. CLEO'88, TuV4, Anaheim, April (1988).
K. ODA, N. TAKATO, H. TOBA and K. NOSU,J. Lightwave Technol. 6 (1988) 1016.
K. IWATSUKI, M. SARUWATARI, M. KAWACHI and H. YAMAZAKI,Electron. Lett. 25 (1989) 688.
Y. HIBINO, T. KITAGAWA, M. SHIMIZU, F. HANAWA and A. SUGITA,IEEE Photonics Technol. Lett. 1 (1989) 349.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kawachi, M. Silica waveguides on silicon and their application to integrated-optic components. Opt Quant Electron 22, 391–416 (1990). https://doi.org/10.1007/BF02113964
Issue Date:
DOI: https://doi.org/10.1007/BF02113964