Abstract
Measurements of the angular distribution of copper atoms which are sputtered by noble gas ions within the energy range between 0.1 and 1 MeV have been carried out for different angles of ion incidence. The hemisphere over the target surface could be studied with a microphotometer inside the sputtering chamber and the distributions can be plotted in tri-dimensional diagrams. The results are in principle similar to those obtained at lower energies. The angle of maximum emission varies with ion energy and with the angle of incidence and can be related to the sputtering yield.
Similar content being viewed by others
References
Behrisch, R.: Ergebn. exakt. Naturwiss.35, 295 (1964)
Kaminsky, M.: Berlin-Heidelberg-New York: Springer 1965
Wehner, G.K., Rosenberg, D.: J. Appl. Phys.31, 177 (1960)
Stein, R., Hurlbut, F.C.: Phys. Rev.123, 790 (1961)
Stein, R.P., Malakhof, V., Smith, H.P.: J. Appl. Phys.36, 1504 (1965)
Rol, P.K., Fluit, M.J., Kistemaker, J.: Physica26, 1009 (1960)
Cobič, B., Perovič, B.: Proc. IV. Int. Conf. Ion. Phen. Gases Uppsala (1960)
Patterson, H., Tomlin, D.: Proc. Roy. Soc.265, 474 (1962)
Gronlund, F., Moore, W. J.: J. Chem. Phys.32, 1540 (1960)
Betz, G., Dobrozemsky, R., Viehböck, F.: Nederl. Tijedschrift vor Vacuumtechn.8, 203 (1970)
Krüger, W., Rödelsperger, K., Scharmann, A.: Z. Physik262, 315 (1973)
Mayer, H.: Physik dünner Schichten I, II. Stuttgart: Wiss. Verlagsgesellsch. 1950, 1955
Wolter, H.: Z. Physik105, 269 (1937)
Chadderton, L.T., Johansen, A., Steenstrup, S., Sarholt-Kristensen, L.: Rad. Effects17, 281 (1973)
Weijsenfeld, C.H.: Philips Res. Repts, Suppl. No. 2 (1967)
Koedam, M.: Philips Res. Repts.16, 101 (1961)
Schulze, R.: Physik. Zeitschrift34, 24 (1933)
Author information
Authors and Affiliations
Additional information
Dedicated to Prof. Dr. H. Ewald on occasion of his sixtieth birthday.
We thank Mr. G. Trylat for helpful technical assistance, Dr. Hofer, Aarhus, for critical remarks and the Bundesministerium für Forschung und Technologie for support.
Rights and permissions
About this article
Cite this article
Rödelsperger, K., Krüger, W. & Scharmann, A. Angular distribution of copper atoms sputtered with energetic ions. Z. Physik 269, 83–88 (1974). https://doi.org/10.1007/BF01668873
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01668873