Abstract
The results for the ablation of polymers by High-Intensity Pulsed Ion Beams (HIPIB) as well as by laser pulses of different wavelengths and pulse widths are discussed. A thermal model is proposed that reproduces all available experimental data. An Arrhenius type relation is assumed for the ablation velocityw(T) =w 0 exp (−T 1/T). Once the two parametersw 0 andT 1 are known for a certain polymer the model allows one to predict the ablation rate as a function of laser wavelength, fluence, and pulse width and for HIPIB pulses.
Similar content being viewed by others
References
R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett.41, 576 (1982)
H.H.J. Jellinek, R. Srinivasan: J. Phys. Chem.88, 3084 (1984)
R. Srinivasan, B. Braren, R.W. Dreyfus: J. Appl. Phys.61, 372 (1987)
J.E. Andrew, P.E. Dyer, D. Forster, P.H. Key: Appl. Phys. Lett.43, 717 (1983)
J.H. Brannon, J.R. Lankhard, A.J. Baise, F. Bums, J. Kaufmann: J. Appl. Phys.58, 2036 (1985)
P.E. Dyer, J. Sidhu: J. Appl. Phys.57, 1420 (1985)
R. Srinivasan: J. Appl. Phys.70, 7588 (1991)
G. Gorodetsky, T.G. Kazyaka, R.L. Melcher, R. Srinivasan: Appl. Phys. Lett.46, 828 (1985)
T. Feurer, S. Wahl, H. Langhoff: J. Appl. Phys.74, 3523 (1993)
T. Venkatesan, S.R. Forrest, M.L. Kaplan, C.A. Murray, P.H. Schmidt, B.J. Wilkens: J.Appl. Phys.54, 3150 (1983)
J. Davenas, G. Boiteux, X.L. Xu, E. Adam: Nucl. Instrum. Methods B32, 136 (1988)
S. Küper, J. Brannon, K. Brannon: Appl. Phys. A56, 43 (1993)
G. Koren, J.T.C. Yeh: J. Appl. Phys.56, 2120 (1984)
E.E. Nikitin:Theory of elementary atomic and molecular processes in gases (Clarendon, Oxford 1974)
P.E. Dyer, R. Srinivasan: J. Appl. Phys.66, 2608 (1989)
J.F. Ziegler, J.P. Biersack, U. Littmark:The stopping and ranges of ions in solids, Pergamon, New York (1985)
G.H. Pettit, R. Sauerbrey: Appl. Phys. A56, 51 (1993)
R. Taylor, D. Singleton, G. Paraskevopoulos: Appl. Phys. Lett.50, 1779 (1987)
R. Srinivasan, B. Braren, R.W. Dreyfus: J. Appl. Phys.61, 372 (1986)
D.P. Brunco, M.O. Thompson, C.E. Otis, P.M. Goodwin: J. Appl. Phys.72, 4344 (1992)
A.D. Zweig, T.F. Deutsch: Appl. Phys. Lett. B54, 76 (1992)
R. Srinivasan, B. Braren: J. Appl. Phys.68, 1837 (1990)