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Resputtering effects by measurements of angular distributions

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Zeitschrift für Physik

Abstract

Angular distributions of copper atoms sputtered at bombarding energies between 100 and 1000 keV from polycrystalline targets are measured by a collector method. The deposit was detected immediately after bombardment with a photometer placed in the sputtering chamber. This arrangement allowed to perform series of measurements at different ion doses without oxidation of the film. Because of the fastness of this method we obtained a large number of distribution profiles showing principle errors of the collector method effected by condensation coefficients lower than one. The angular distributions are described without influence of these errors by the angle of maximum emission and the base width of the distributions.

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References

  1. Berisch, R.: Ergebn. Exakt. Naturw.35, 295 (1964).

    Google Scholar 

  2. Kaminsky, M.: Atomic and ionic impact phenomena on metal surfaces. Berlin-Heidelberg-New York: Springer 1965.

    Google Scholar 

  3. Carter, G., Colligon, J. S.: Ion bombardment of solids. London: Heinemann 1968.

    Google Scholar 

  4. Mayer, H.: Physik dünner Schichten I, II. Stuttgart: Wiss. Verlagsgesellschaft 1950, 1955.

    Google Scholar 

  5. Gurmin, B., Rhyzov, V., Skharban, I.: Bull. Acad. Sci. USSR,33, 753 (1969).

    Google Scholar 

  6. Rödelsperger, K.: Dipomarbeit, Gießen 1972.

  7. Weijsenfeld, C. H.: Philips Res. Repts., Suppl.2 (1967).

  8. Brown, F., Davis, J. A.: Can. J. Phys.41, 844 (1963).

    Google Scholar 

  9. Almen, O., Bruce, B.: Nucl. Instr. and Meth.11, 279 (1961).

    Google Scholar 

  10. Ramer, C. E., Musti, A.: J. Appl. Phys.35, 1673 (1964).

    Google Scholar 

  11. Schmeisser, H., Harsdorff, M.: Z. Naturforsch.25 a, 1896 (1970).

    Google Scholar 

  12. Blois, M. S., Rieser, L. M.: J. Appl. Phys.25, 338 (1954).

    Google Scholar 

  13. Benninghoven, A., Storp, S.: Z. Angew. Phys.31, 31 (1970).

    Google Scholar 

  14. Bispinck, H.: Z. Naturforsch.25 a, 70 (1970).

    Google Scholar 

  15. McCracken, G. M., Erents, S. K.: International Conference on Ion-Surface Interaction Sputtering, and Related Phenomena. Garching (1972).

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Authors and Affiliations

  1. I. Physikalisches Institut der Justus Liebig-Universität Gießen, Federal Republic of Germany

    W. Krüger, K. Rödelsperger & A. Scharmann

Authors
  1. W. Krüger
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  2. K. Rödelsperger
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  3. A. Scharmann
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Additional information

We would like to thank Mr. Trylat for technical assistance and the Bundesministerium für Forschung und Technologie and the Fraunhofer-Gesellschaft for financial support.

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Krüger, W., Rödelsperger, K. & Scharmann, A. Resputtering effects by measurements of angular distributions. Z. Physik 262, 315–326 (1973). https://doi.org/10.1007/BF01400844

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  • DOI: https://doi.org/10.1007/BF01400844

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