Versuch einer quantitativen Erfassung der Textur von Gold-Aufdampfschichten

Abstract

The fiber texture of evaporated gold films is investigated by a registration technique inside a Siemens Elmiskop I. The intensity of electron diffraction is measured along the circumference of the Debye-Scherrer ring. The thickness of the films varies in the range 50 to 700 Å and the glass substrate temperature from room temperature to 400°C. In all films we found a (111) fiber texture. Subsidiary maxima of a (511) texture are contributed to the formation of microtwins. For comparison of the texture a quantityT is introduced.T has a strong relation to the electron microscopical structure of the films. Layers with island structure and with small crystals at low substrate temperatures exhibit only very small values ofT. The textureT increases with increasing recrystallisation, (111) oriented crystals having the largest growing rate in the layer plane.