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Production of ultra-fine silicon powder by the arc plasma method

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Abstract

A method of producing ultra-fine silicon powder is described. The most probable particle size produced by this method was estimated to be about 30 nm by TEM observation and X-ray diffraction. The powder was produced by an arc plasma method. This method is quite feasible for bulk continuous production of ultra-fine powder. Mechanisms of the production of the powder are also discussed. The principal mechanism for this ultra-fine powder production is attributed to the increase of the partial pressure of nitrogen (or hydrogen) gas by an arc plasma.

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Authors and Affiliations

  1. Department of Mechanical Engineering, The Technological University of Nagaoka, 940-21, Nagaoka, Niigata, Japan

    K. Tanaka, K. Ishizaki, S. Yumoto & T. Egashira

  2. Powder Technology Division, National Research Institute for Metals, 153, Nakameguro, Tokyo, Japan

    M. Uda

Authors
  1. K. Tanaka
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  2. K. Ishizaki
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  3. S. Yumoto
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  4. T. Egashira
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  5. M. Uda
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Tanaka, K., Ishizaki, K., Yumoto, S. et al. Production of ultra-fine silicon powder by the arc plasma method. J Mater Sci 22, 2192–2198 (1987). https://doi.org/10.1007/BF01132959

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  • DOI: https://doi.org/10.1007/BF01132959

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