Abstract
A sensor based on limiting current density characteristics of a wire tip electrode has been shown to be capable of measuring local variations of agitation and its effect on coating thickness variations during electrodeposition. The effectiveness of agitation is expressed as an enhancement factor.
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Amadi, S.A., Gabe, D.R. & Goodenough, M. An electrochemical mass transport sensor to study agitation in electroplating processes. J Appl Electrochem 21, 1114–1119 (1991). https://doi.org/10.1007/BF01041457
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DOI: https://doi.org/10.1007/BF01041457