Abstract
High rate anodic dissolution of Fe, Fe13Cr, Fe24Cr, Cr and AISI type 304 stainless steel is studied in NaCl and NaNO3 using a flow channel cell with well-defined hydrodynamic conditions. The apparent valence for dissolution and the surface finish are investigated as a function of current density. Electrochemical etching experiments through photoresist masks are performed with type 304 stainless steel using NaNO3. The influence of current density on the shape and surface finish of the etch grooves and the uniformity of the attack between differently spaced grooves can be qualitatively explained from the electrochemical data obtained on flat electrodes.
Similar content being viewed by others
References
J. A. McGeough, ‘Principles of Electrochemical Machining’, Chapman and Hall, London (1974) pp. 255.
D. Landolt, ‘Proc. Symp. Electrochemical Technology in the Electronics Industry’, (edited by L. Rowankiw and T. Osaka), Electrochemical Soc, Princeton, New Jersey (1988) p. 573.
D. M. Allen, ‘The Principles and Practice of Photochemical Machining and Photoetching’, Adam Hilger, Bristol and Boston (1986) pp. 190.
W. C. Wicke, U.S. Patent 2.900,283 June 27 (1961).
M. Hiermaier and H. Simon,Galvanotechnik 74 (1983) 401.
B. Chatterjee,Precision Eng 8 (1986) 131.
M. Datta and D. Landolt,Electrochim. Acta. 25 (1980) 1255.
M. Datta and D. Landolt,Electrochim. Acta. 25 (1980) 1263.
Th. Heumann and H. S. Panesar,J.E.C.S. 110 (1963) 628.
O. A. Arzhintar, A. I. Dikusar, V. I. Petrenko and Yu. N. Petrov,Electron. Orab. Mater 6 (1974) 9.
A. D. Davydov, E. N. Kiriyak and V. D. Kaschceev,Elektrohimiya 14 (1980) 1420.
H. C. Kuo and D. Landolt,Electrochim. Acta 20 (1975) 393.
D. T. Chin and K. W. Mao,J. Appl. Electrochem. 4 (1974) 155.
D. Landolt, in ‘Passivity of Metals' (edited by R. P. Frankenthal and J. Kruger), Electrochemical Soc. (1978) p. 484.
M. S. El-Basionny and S. Haruyama,Corros. Sci. 7 (1977) 405.
Gmelin, ‘Handbook der anorganischen Chemie’, Aufl. Nr. 52, Cr[A] (1968) p. 458.
E. Rosset, Photodécoupage Electrochimique en Milieu Salin Neutre. Ph.D Thesis No. 731, EPFL, Lausanne (1988).
M. Datta and D. Landolt,J.E.C.S. 122 (1975) 1466.
R. C. Alkire and P. B. Reiser,J.E.C.S. 131 (1984) 2795.
R. C. Alkire and H. Deligianni,J.E.C.S. 135 (1988) 1093.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Rosset, E., Datta, M. & Landolt, D. Electrochemical dissolution of stainless steels in flow channel cells with and without photoresist masks. J Appl Electrochem 20, 69–76 (1990). https://doi.org/10.1007/BF01012473
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01012473