Angular distribution and differential sputtering yields for low-energy light-ion irradiation of polycrystalline nickel and tungsten

Abstract

Angular differential and total sputtering yields of polycrystalline nickel and tungsten have been measured for 1 and 4 keV H⁺ and 4 keV He⁺ ion bombardment at incidence angles between 0° and 80°. The differential sputtering yields (dY/dΩ) were determined with the aid of the collector technique, whereas the total yieldY was determined from the weight loss of the target during irradiation. Asymmetric angular distributions are observed at oblique angles of incidence, the emission maximum being shifted in forward direction (with respect to the incident ions). Even more pronounced than the change in shape of the emission distribution is an increase in the differential yield:dY/dΩ rises with increasing incidence angle over the whole range of ejection angles, the increase being most prominent in the direction of primary recoil emission. This effect is therefore ascribed to emission of surface atoms in direct projectile-surface atom collisions.