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The equilibrium topography of sputtered amorphous solids

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Abstract

A theory is developed for the sputtering of amorphous solid by an ion beam and the changes in surface topography to which this sputtering leads. It is shown that surfaces which have pinning regions, such as vertical steps and included impurities, reach an equilibrium in which cones are developed on the surface. The theory is compared with several experimental observations of such conical development.

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References

  1. V. Marinkovic andB. Navinsek, Proc. 3rd European Regional Conf. on Electron Microscopy, Prague, 1964. pP. 311–12.

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Authors and Affiliations

  1. Department of Electrical Engineering, University of Salford, UK

    M. J. Nobes, J. S. Colligon & G. Carter

Authors
  1. M. J. Nobes
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  2. J. S. Colligon
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  3. G. Carter
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Nobes, M.J., Colligon, J.S. & Carter, G. The equilibrium topography of sputtered amorphous solids. J Mater Sci 4, 730–733 (1969). https://doi.org/10.1007/BF00742430

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  • DOI: https://doi.org/10.1007/BF00742430

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