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Production of a TiN film with nanoscale particle size by a combined method of plasma-alloy reaction and spray deposition

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Journal of Materials Science Letters

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References

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Authors and Affiliations

  1. Institute for Materials Research, Tohoku University, 980, Sendai, Japan

    A. Inoue, B. G. Kim, K. Nosaki, T. Yamaguchi & T. Masumoto

Authors
  1. A. Inoue
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  2. B. G. Kim
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  3. K. Nosaki
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  4. T. Yamaguchi
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  5. T. Masumoto
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Additional information

On leave from: Honda Research and Development Co., Ltd, Wako 351-01, Japan.

On leave from: Research and Development Division, Yoshida Kogyo KK, Kurobe 938, Japan.

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Inoue, A., Kim, B.G., Nosaki, K. et al. Production of a TiN film with nanoscale particle size by a combined method of plasma-alloy reaction and spray deposition. J Mater Sci Lett 11, 865–867 (1992). https://doi.org/10.1007/BF00730489

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  • DOI: https://doi.org/10.1007/BF00730489

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