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Deposition of tantalum nitride thin films from ethylimidotantalum complex

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Applied Chemistry, National Chiao Tung University, 30050, Hsinchu, Taiwan

    Hisn-Tien Chiu & Wen-Ping Chang

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  1. Hisn-Tien Chiu
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  2. Wen-Ping Chang
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Chiu, HT., Chang, WP. Deposition of tantalum nitride thin films from ethylimidotantalum complex. J Mater Sci Lett 11, 96–98 (1992). https://doi.org/10.1007/BF00724610

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  • DOI: https://doi.org/10.1007/BF00724610

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