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Synthesis and properties of cobalt carbide film by radio-frequency magnetron sputtering

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Applied Chemistry, Nagoya University, Furo-cho, Chikusa-ku, 464-01, Nagoya, Japan

    S. Tajima & S. -I. Hirano

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  1. S. Tajima
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  2. S. -I. Hirano
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Tajima, S., Hirano, S.I. Synthesis and properties of cobalt carbide film by radio-frequency magnetron sputtering. J Mater Sci Lett 11, 22–25 (1992). https://doi.org/10.1007/BF00720770

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  • DOI: https://doi.org/10.1007/BF00720770

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