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Thin film deposition profiles using a ballistic aggregation model

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Electrical Engineering, University of Alberta, T6G 2G7, Edmonton, Alberta, Canada

    M. J. Brett

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  1. M. J. Brett
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Brett, M.J. Thin film deposition profiles using a ballistic aggregation model. J Mater Sci Lett 8, 415–417 (1989). https://doi.org/10.1007/BF00720691

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  • DOI: https://doi.org/10.1007/BF00720691

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