Skip to main content
SpringerLink
Log in

Chemical transport of boron in a low pressure hydrogen plasma

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. F. H. COCKS, P. L. JONES and L. J. DIMMEY,Appl. Phys. Lett. 36 (1980) 970.

    Google Scholar 

  2. P. GRONER, J. K. GIMZEWSKI, and S. VEPŘEK,J. Nucl. Mater. 103–104 (1981) 257.

    Google Scholar 

  3. S. VEPŘEK,J. Cryst. Growth 17 (1972) 101.

    Google Scholar 

  4. Idem, J. Chem. Phys. 57 (1972) 952.

    Google Scholar 

  5. S. W. ING Jr and Y. S. CHIANG,J. Electrochem. Soc. 113 (1966) 192.

    Google Scholar 

  6. C. B. ZAROWIN, IBM Research Report, RC 7157, No. 30678, 6/6/78.

  7. S. VEPŘEK and V. MAREČEK,Solid-State Electron. 11 (1967) 683.

    Google Scholar 

  8. G. I. BABAT,J. Inst. Elec. Eng. Pt. III 94 (1947) 27.

    Google Scholar 

  9. R. M. ADAMS, in “Boron, Metallo-Boron Compounds and Boranes”, edited by R. M. Adams (Interscience, New York, 1964) p. 507.

    Google Scholar 

  10. L. BARTON, In “New Trends in Chemistry: Topics in Current Chemistry 100”, edited by F. L. Boschke (Springer, Berlin, 1982).

    Google Scholar 

  11. J. H. E. JEFFES,J. Cryst. Growth 3, 4 (1968) 13.

    Google Scholar 

  12. JANAF Thermochemical Tables 2nd edn, NSRDS-NBS37 (US National Bureau of Standards, 1971)

  13. J. L. PARSONS and M. E. MILBERG,J. Amer. Ceram. Soc. 43 (1960) 326.

    Google Scholar 

  14. W. ZIMMERMAN III, A. M. MURPHY and C. FELDMAN,Appl. Phys. Lett. 10 (1967) 71.

    Google Scholar 

  15. C. C. TSAI,Phys. Rev. 19 (1979) 2041.

    Google Scholar 

  16. N. A. BLUM, C. FELDMAN, and F. G. SATKIEWICZ,Phys. Status Solidi (a) 41 (1977) 481.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Metallurgy and Materials Science, Faculty of Engineering, The University of Tokyo, Bunkyo-ku, 113, Tokyo, Japan

    Shojiro Komatsu, Toyonobu Yoshida & Kazuo Akashi

Authors
  1. Shojiro Komatsu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Toyonobu Yoshida
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Kazuo Akashi
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Komatsu, S., Yoshida, T. & Akashi, K. Chemical transport of boron in a low pressure hydrogen plasma. J Mater Sci Lett 4, 51–54 (1985). https://doi.org/10.1007/BF00719894

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00719894

Keywords

Search

Navigation