Abstract
Chemical processing of materials with lasers is a new and interdisciplinary field with many already realized and potential applications in different areas of technology. This overview summarizes some recent developments in this rapidly expanding field.
Similar content being viewed by others
References
D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mater. Sci.1 (Springer, Berlin, Heidelberg 1986)
D. Bäuerle (ed.):Laser Processing and Diagnostics, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984)
T. Szörényi, K. Piglmayer, G.Q. Zhang, D. Bäuerle: To be published
D. Bäuerle: InLaser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (North-Holland, New York 1983) p. 19
D. Bäuerle: Laser Optoelektron.1, 29 (1985)
D. Bäuerle: InLaser Processing and Diagnostics, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984) p. 166
T. Szörényi, M. Boman, D. Bäuerle: Unpublished
J. Doppelbauer, D. Bäuerle: InInterfaces under Laser Irradiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet, Nato ASI Series (Nijhoff, Dordrecht 1987) p. 277
T. Szörényi, G.Q. Zhang, D. Bäuerle: Unpublished
T. Szörényi, G.Q. Zhang, Y.C. Du, R. Kullmer, D. Bäuerle: InLaser Processing and Diagnostics II, ed. by D. Bäuerle, K.L. Kompa, L.D. Laude (Physique, Les Ulis 1986) p. 91
G.Q. Zhang, T. Szörényi, D. Bäuerle: J. Appl. Phys.62, 673 (1987)
G.S. Higashi, G.E. Blonder, C.G. Fleming: InPhoton, Beam, and Plasma Stimulated Chemical Processes at Surfaces, ed. by V.M. Donnelly, I.P. Herman, M. Hirose (Materials Research Society 1987) p. 117
G. Liberts, M. Eyett, D. Bäuerle: Appl. Phys. A45, 313–316 (1988)
A. Kapenieks, M. Eyett, D. Bäuerle: Appl. Phys. A41, 331 (1986)
U. Kolzer, M. Eyett, D. Bäuerle: To be published
M. Eyett, R. Kullmer, D. Bäuerle: InProc. SPIE Int. Symp. on Optical and Optoelectronic Applied Science and Engineering, Topical Meeting on High Power Lasers, Vol.801 (1987) p. 156 M. Eyett, D. Bäuerle: Ferroelectrics Lett. (1988) (to be published)
R. Kullmer, D. Bäuerle: Appl. Phys. A43, 227 (1987)
P. Mogyorósi, K. Piglmayer, R. Kullmer, D. Bäuerle: Appl. Phys. A45, 293–299 (1988)
R. Kullmer, D. Bäuerle: Appl. Phys. A43, 227–232 (1987)
M. Eyett, D. Bäuerle, W. Wersing, H. Thomann: J. Appl. Phys.62, 1511 (1987)
M. Eyett, D. Bäuerle: Appl. Phys. Lett.51, 2054 (1987)
M. Wautelet, L.D. Laude: Appl. Phys. Lett.36, 197 (1980)
N. Itoh, T. Nakayama: Phys. Lett.92A, 471 (1982)
R. Srinivasan: InLaser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984) p. 343; InInterfaces under Laser Irradiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet, Nato ASI Series (Nijhoff, Dordrecht 1987) p. 359
Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, H. Okano: Appl. Phys. A44, 313 (1987)