Skip to main content
Log in

Chemical processing with lasers: Recent developments

  • Published:
Applied Physics B Aims and scope Submit manuscript

Abstract

Chemical processing of materials with lasers is a new and interdisciplinary field with many already realized and potential applications in different areas of technology. This overview summarizes some recent developments in this rapidly expanding field.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mater. Sci.1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  2. D. Bäuerle (ed.):Laser Processing and Diagnostics, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984)

    Google Scholar 

  3. T. Szörényi, K. Piglmayer, G.Q. Zhang, D. Bäuerle: To be published

  4. D. Bäuerle: InLaser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (North-Holland, New York 1983) p. 19

    Google Scholar 

  5. D. Bäuerle: Laser Optoelektron.1, 29 (1985)

    Google Scholar 

  6. D. Bäuerle: InLaser Processing and Diagnostics, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984) p. 166

    Google Scholar 

  7. T. Szörényi, M. Boman, D. Bäuerle: Unpublished

  8. J. Doppelbauer, D. Bäuerle: InInterfaces under Laser Irradiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet, Nato ASI Series (Nijhoff, Dordrecht 1987) p. 277

    Google Scholar 

  9. T. Szörényi, G.Q. Zhang, D. Bäuerle: Unpublished

  10. T. Szörényi, G.Q. Zhang, Y.C. Du, R. Kullmer, D. Bäuerle: InLaser Processing and Diagnostics II, ed. by D. Bäuerle, K.L. Kompa, L.D. Laude (Physique, Les Ulis 1986) p. 91

  11. G.Q. Zhang, T. Szörényi, D. Bäuerle: J. Appl. Phys.62, 673 (1987)

    Google Scholar 

  12. G.S. Higashi, G.E. Blonder, C.G. Fleming: InPhoton, Beam, and Plasma Stimulated Chemical Processes at Surfaces, ed. by V.M. Donnelly, I.P. Herman, M. Hirose (Materials Research Society 1987) p. 117

  13. G. Liberts, M. Eyett, D. Bäuerle: Appl. Phys. A45, 313–316 (1988)

    Google Scholar 

  14. A. Kapenieks, M. Eyett, D. Bäuerle: Appl. Phys. A41, 331 (1986)

    Google Scholar 

  15. U. Kolzer, M. Eyett, D. Bäuerle: To be published

  16. M. Eyett, R. Kullmer, D. Bäuerle: InProc. SPIE Int. Symp. on Optical and Optoelectronic Applied Science and Engineering, Topical Meeting on High Power Lasers, Vol.801 (1987) p. 156 M. Eyett, D. Bäuerle: Ferroelectrics Lett. (1988) (to be published)

  17. R. Kullmer, D. Bäuerle: Appl. Phys. A43, 227 (1987)

    Google Scholar 

  18. P. Mogyorósi, K. Piglmayer, R. Kullmer, D. Bäuerle: Appl. Phys. A45, 293–299 (1988)

    Google Scholar 

  19. R. Kullmer, D. Bäuerle: Appl. Phys. A43, 227–232 (1987)

    Google Scholar 

  20. M. Eyett, D. Bäuerle, W. Wersing, H. Thomann: J. Appl. Phys.62, 1511 (1987)

    Google Scholar 

  21. M. Eyett, D. Bäuerle: Appl. Phys. Lett.51, 2054 (1987)

    Google Scholar 

  22. M. Wautelet, L.D. Laude: Appl. Phys. Lett.36, 197 (1980)

    Google Scholar 

  23. N. Itoh, T. Nakayama: Phys. Lett.92A, 471 (1982)

    Google Scholar 

  24. R. Srinivasan: InLaser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem. Phys., Vol.39 (Springer, Berlin, Heidelberg 1984) p. 343; InInterfaces under Laser Irradiation, ed. by L.D. Laude, D. Bäuerle, M. Wautelet, Nato ASI Series (Nijhoff, Dordrecht 1987) p. 359

    Google Scholar 

  25. Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, H. Okano: Appl. Phys. A44, 313 (1987)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bäuerle, D. Chemical processing with lasers: Recent developments. Appl. Phys. B 46, 261–270 (1988). https://doi.org/10.1007/BF00692884

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00692884

PACS

Navigation