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Measurement of surface defects by low-energy electron diffraction

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Abstract

Low-energy electron diffraction is capable of detection of non-periodic arrangements by spot profile analysis (SPA-LEED). All kinds of defects may be identified by a qualitative and nevertheless systematic evaluation of the diffraction pattern with respect to spot shape, background and energy dependance. It is shown that the kinematical approximation provides far reaching results. The importance and achievements of the newly developed high-resolution instrumentation is demonstrated. The quantitative evaluation provides data on defect density and distribution, which are not available otherwise, as demonstrated with examples. A comparison of imaging and diffraction techniques shows the special advandages of diffraction with respect to quantitative analysis.

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References

  1. M. Henzler: In:Electrons Spectroscopy for Surface Analysis, ed. by H. Ibach, Topics Current Phys.4 (Springer, Berlin, Heidelberg, New York 1977)

    Google Scholar 

  2. M. Henzler: In:Festkörperprobleme XIX, ed. by J. Treusch (Vieweg, Braunschweig 1979) p. 193

    Google Scholar 

  3. M. Henzler: Appl. Surf. Sci.11/12, 450 (1982)

    Google Scholar 

  4. M. Lagally: Appl. Surf. Sci.13, 260 (1982)

    Google Scholar 

  5. P.M. Marcus, F. Jona: Appl. Surf. Sci.11/12, 20 (1982)

    Google Scholar 

  6. E. Suliga, M. Henzler: J. Vac. Sci. Tech. A1(3), 1507 (1983)

    Google Scholar 

  7. W. König: Diploma Thesis, Hannover (1982)

  8. D.G. Welkie, M.G. Lagally, R.L. Palmer: J.Vac.Sci.Tech.17, 453 (1980)

    Google Scholar 

  9. P. Marienhoff, M. Henzler: J. Vac. Sci. Tech. (submitted)

  10. M. Henzler: Surf. Sci.22, 12 (1970); Appl. Phys.9, 11 (1976)

    Google Scholar 

  11. H. Jagodzinski: Z. Naturforsch.37a, 1103 (1982)

    Google Scholar 

  12. K.D. Gronwald, M. Henzler: Surf. Sci.117, 180 (1982)

    Google Scholar 

  13. C.S. Lent, P.I. Cohen: Surf. Sci. in press

  14. T.-M. Lu, M.G. Lagally: Surf. Sci.99, 695 (1980), and120, 47 (1982)

    Google Scholar 

  15. F.W. Wulfert, M. Henzler: To be published

  16. M.G. Lagally, J.A. Martin: Rev. Sci. Instr.54, 1273 (1983)

    Google Scholar 

  17. R.L. Park, J.E. Houston: Surf. Sci.18, 43 (1969)

    Google Scholar 

  18. J.E. Houston, R.L. Park: Surf. Sci.21, 209 (1970)

    Google Scholar 

  19. M. Henzler: Surf. Sci.73, 240 (1978)

    Google Scholar 

  20. J.M. Pimbley, T.-M. Lu: J. Appl. Phys.55, 182 (1984)

    Google Scholar 

  21. J.M. Cowley, H. Schuman: Surf. Sci.38, 53 (1973)

    Google Scholar 

  22. M. Henzler: Surf. Sci.132, 82 (1983)

    Google Scholar 

  23. P.O. Hahn, J.G. Clabes, M. Henzler,: J. Appl. Phys.51, 2079 (1980)

    Google Scholar 

  24. J.M. v. Hove, C.S. Lent, P.R. Pukite, P.I. Cohen: J. Vac. Sci. Tech. B1, 741 (1983)

    Google Scholar 

  25. P.O. Hahn, M. Henzler: J. Appl. Phys.52, 4122 (1981)

    Google Scholar 

  26. P.O. Hahn, M. Henzler: J. Appl. Phys.54, 6492 (1983)

    Google Scholar 

  27. P.O. Hahn, S. Yokohama, M. Henzler: Surf. Sci. (submitted)

  28. G. Schulze, M. Henzler: Surf. Sci.124, 336 (1983)

    Google Scholar 

  29. D.G. Welkie, M.G. Lagally: J. Vac. Sci. Tech.16, 784 (1979)

    Google Scholar 

  30. J.W. Bartha: Dissertation, Hannover (1983)

  31. L.D. Roelofs: Appl. Surf. Sci.11/12, 425 (1982)

    Google Scholar 

  32. E.W. Müller, T.T. Tsong:Field Ion Microscopy (Elsevier, New York 1969), also E.W. Müller: Festschrift: Surf. Sci.70 (1978)

    Google Scholar 

  33. N. Osakabe, Y. Tanishiro, K. Yagi, G. Honjo, K. Takayanaji: Surf. Sci.97, 393 (1980);102, 424 (1980);104, 527 (1981)

    Google Scholar 

  34. G. Binning, H. Rohrer: Surf. Sci.126, 236 (1983)

    Google Scholar 

  35. J.J. Harris, B.A. Joyce, P.J. Dobson: Surf. Sci. Lett.108, L444 (1981)

    Google Scholar 

  36. P.J. Dobson, J.H. Neave, B.A. Joyce: Surf.Sci.Lett.119, L339 (1982)

    Google Scholar 

  37. G. Brusdeylins, R.B. Doak, J.P. Toennies: J. Chem. Phys.75, 1784 (1981)

    Google Scholar 

  38. R.B. Doak, J.P. Toennis: Surf. Sci.117, 1 (1981)

    Google Scholar 

Download references

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Authors and Affiliations

  1. Institut für Festkörperphysik, Universität, D-3000, Hannover, Fed. Rep. Germany

    M. Henzler

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  1. M. Henzler
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Henzler, M. Measurement of surface defects by low-energy electron diffraction. Appl. Phys. A 34, 205–214 (1984). https://doi.org/10.1007/BF00616574

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  • DOI: https://doi.org/10.1007/BF00616574

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