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Dynamic study of ion etching in a high resolution SEM

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Abstract

On-line studies of surface topographical development have been made by mounting a saddle-field ion source into a standard scanning electron microscope. Preliminary results obtained during operation in both dynamic and static modes are presented.

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References

  1. A. D. G. Stewart and M. W. Thompson, J. Mater. Sci. 4 (1969) 56.

    Google Scholar 

  2. M. J. Nobes, J. S. Colligon and G. Carter, ibid 4 (1969) 730.

    Google Scholar 

  3. G. Carter, J. S. Colligon and M. J. Nobes, ibid 6 (1971) 115.

    Google Scholar 

  4. C. Catana, J. S. Colligon and G. Carter, ibid 7 (1972) 467 Letters.

    Google Scholar 

  5. G. Carter, ibid 11 (1976) 1091.

    Google Scholar 

  6. D. J. Barber, E. C. Frank, M. Moss, J. W. Steeds and I. S. T. Tsong, ibid 8 (1973) 1030.

    Google Scholar 

  7. J. P. Ducommun, M. Cantagrel and M. Marchal, ibid 9 (1974) 725.

    Google Scholar 

  8. G. Carter, M. J. Nobes and J. L. Whitton, ibid 13 (1978) Letters.

    Google Scholar 

  9. G. Carter, M. J. Nobes and K. I. Arshak, Wear 53 (1979) 245.

    Google Scholar 

  10. R. S. Dhariwal and R. Fitch, J. Mater. Sci. 12 (1977) 1225.

    Google Scholar 

  11. A. H. McIlraith, Nature 212 (1966) 1422.

    Google Scholar 

  12. R. K. Fitch, T. Mulvey, W. J. Thatcher and A. H. McIlraith, J. Phys. D 3 (1970) 1339.

    Google Scholar 

  13. G. J. Rushton, K. R. O'shea and R. K. Fitch, J. Phys. D 6 (1973) 1167.

    Google Scholar 

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Authors and Affiliations

  1. Department of Electrical Engineering, University of Salford, Salford, UK

    G. W. Lewis, J. S. Colligon & M. J. Nobes

Authors
  1. G. W. Lewis
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  2. J. S. Colligon
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  3. M. J. Nobes
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Lewis, G.W., Colligon, J.S. & Nobes, M.J. Dynamic study of ion etching in a high resolution SEM. J Mater Sci 15, 681–684 (1980). https://doi.org/10.1007/BF00551734

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  • DOI: https://doi.org/10.1007/BF00551734

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