Abstract
Thin superconductive films of YBa2Cu3O7−x have been deposited on (100) single crystal SrTiO3 substrates by using technique of ArF pulse excimer laser evaporation of bulk YBCO target in a vacuum, followed by slow cooling in an oxygen atmosphere. Thin-film properties are strongly influenced by the processing conditions. The effect of pulse repetition rate, beam power, beam size on the target surface and oxygen pressure on the surface morphology and superconductive properties of deposited films has been investigated. Film characterization has been performed by using X-ray diffractometry, scanning electron microscopy and four-point probe electrical instruments.
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Riabkina-Fishman, M., Zahavi, J. Effect of processing conditions on superconductive properties of laser-deposited YBCO thin films. JOURNAL OF MATERIALS SCIENCE 28, 3298–3302 (1993). https://doi.org/10.1007/BF00354250
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DOI: https://doi.org/10.1007/BF00354250