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Efficient ablation of organic polymers polyether sulphone and polyether ether ketone by a TEA CO2 laser with high perforation ability

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Abstract

Organic polymer (PES: PolyEther Sulphone and PEEK: PolyEther Ether Ketone) ablation with oscillation-line selected TEA CO2 lasers is successfully demonstrated. With different irradiation conditions the ablative etch-rate slopes were varied, which means that the ablation process is dependent on the ablation conditions such as incident laser intensity and ambient gas. In perforation processing of the PEEK film, the TEA CO2 laser had a higher etch rate of 42 μm/pulse at a fluence of 70 J/cm2 in vacuum than the XeCl laser.

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Authors and Affiliations

  1. Department of Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, 223, Yokohama, Japan

    T. Sumiyoshi, Y. Ninomiya, H. Ogasawara & M. Obara

  2. Power Reactor and Nuclear Fuel Development Corp., 1-9-13 Akasaka, Minato-ku, 107, Tokyo, Japan

    H. Tanaka

Authors
  1. T. Sumiyoshi
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  2. Y. Ninomiya
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  3. H. Ogasawara
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  4. M. Obara
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  5. H. Tanaka
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Sumiyoshi, T., Ninomiya, Y., Ogasawara, H. et al. Efficient ablation of organic polymers polyether sulphone and polyether ether ketone by a TEA CO2 laser with high perforation ability. Appl. Phys. A 58, 475–479 (1994). https://doi.org/10.1007/BF00332440

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  • DOI: https://doi.org/10.1007/BF00332440

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