Abstract
An n-type semiconducting diamond film has been synthesized by the hot filament CVD method using diphosphorus pentaoxide as the doping source. The obtained film was identified as polycrystalline diamond containing few sp2 components by means of several methods including Raman spectroscopy. From measurements of the Hall effect and the Seebeck effect, the film was found to be an n-type semiconductor.
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N. Fujimori, T. Imai, A. Doi: Vacuum 36, 99–102 (1986)
K. Okano, H. Naruki, Y. Akiba, T. Kurosu, M. Iida, Y. Hirose: Jpn. J. Appl. Phys. 27, L173–175 (1988)
K. Okano, H. Naruki, Y. Akiba, T. Kurosu, M. Iida, T. Nakamura: Jpn. J. Appl. Phys. 28, 1066–1071 (1989)
K. Okano, Y. Akiba, T. Kurosu, M. Iida, T. Nakamura: J. Cryst. Growth 99, 1192–1195 (1990)
B.V. Spitsyn: 7th International Conference on Crytal Growth (1986) p. 25
M. Kamo, N. Irimoto, T. Ito, Y. Sato, N. Setaka: Abstract of the 33th Spring Meeting of the Japan Society of Applied Physics, Tokyo, April, 1p-ZD-10 (1986) [in Japanese]
N. Fujimori: New Diamond 2, 10–15 (1986) [in Japanese]
K. Okano: New Diamond 5, 32–33 (1989) [in Japanese]
Y. Hirose, Y. Terasawa: Jpn. J. Appl. Phys. 25, L519–521 (1986)
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Patent pending No. Heisei 1-302209
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Okano, K., Kiyota, H., Iwasaki, T. et al. Synthesis of n-type semiconducting diamond film using diphosphorus pentaoxide as the doping source. Appl. Phys. A 51, 344–346 (1990). https://doi.org/10.1007/BF00324317
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DOI: https://doi.org/10.1007/BF00324317