Summary
A general surface analysis method has been developed based on non-selective photoionization of sputtered or desorbed neutral atoms and molecules above the surface, followed by time-of-flight mass spectrometry. The approach, currently utilizes two main types of ionizing radiation and a variety of desorption probes. For photoionization, coherent untuned sources are used; an intense focused pulsed UV laser beam is used for non-resonant multiphoton ionization to give elemental and limited chemical information, usually used for inorganic analysis; a coherent VUV source is used for single-photon ionization at 118 nm (10.5 eV) produced by frequency tripling of 355 nm light from a Nd:YAG laser. This paper focuses on single-photon ionization for inorganic systems. The desorption probes used are ion, electron, and laser beams as well as thermal desorption. For depth profiling, ion beams are specifically used. Any focused desorption probe beam can provide lateral spatial resolution.
Similar content being viewed by others
References
For a recent review, see: Becker CH (1990) In: Czanderna AW, Hercules DM (eds) Ion spectroscopies of surfaces, vol 2 of Methods of surface characterization. Plenum Publishing, New York, Ch 4, in press
Winograd N, Baxter JP, Kimock FM (1982) Chem Phys Lett 88:581
Pappas DL, Hrubowchak DM, Ervin MH, Winograd N (1989) Science 243:64
Young CE, Pellin MJ, Callaway WF, Jorgensen B, Schweitzer EL, Gruen DM (1987) Nucl Instrum Methods Phys Res B27:119
Hahn JH, Zenobi R, Zare RN (1987) J Am Chem Soc 109:2842
Becker CH, Gillen KT (1984) Anal Chem 56:1671
Becker CH, Gillen KT (1985) J Opt Soc Am B2:1438
Schühle U, Pallix JB, Becker CH (1988) J Am Chem Soc 110:2323
Pallix JB, Schühle U, Becker CH, Huestis DL (1989) Anal Chem 61:805
Berkowitz J (1979) Photoabsorption, photoionization and photoelectron spectroscopy. Academic Press, New York (and references therein)
Zych LJ, Young JF (1978) IEEE J Quantum Electron QE-14:147
Becker CH, Gillen KT (1985) J Vac Sci Technol A3:1347
Schueler B, Odom RW (1987) J Appl Phys 61:4652
Muller III CH, Lowenthal DD, DeFaccio MA, Smith AV (1988) Optics Lett 13:651
Efthimiopoulos T, Stoicheff BP, Thompson RI (1989) Optics Lett 14:624
Morellec J, Normand D, Petite G (1982) Adv At Mol Phys 18:97
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Becker, C.H. On the use of single-photon ionization for inorganic surface analysis. Fresenius J Anal Chem 341, 3–6 (1991). https://doi.org/10.1007/BF00322096
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00322096