Summary
TiC, SiC and Ti0.5Si0.5C layers have been deposited by magnetron sputtering in Argon at bias voltages between 0 and 1500 V. AES and ARXPS analyses show that TiC and Ti0.5Si0.5C, at bias voltages below 1000 V, are C-rich (+20%) and contain TiC crystallites of diameter below about 10 nm and have a metal-like resistance of about mΩcm. The excess C segregates to the surface of TiC nanocrystallites showing an XPS C 1s level shift similar to Li-graphite or doped fullerenes. The doped carbon (‘carbidic’) interface layer, higher deposition rate and better mechanical strength seem to be interrelated. Magnetron sputtered SiC is X-ray amorphous and insulating, grows more slowly, has reduced mechanical strength and does not contain excess C. The ARXPS analysis of Ti0.5Si0.5C layers allows the modelling of the TiC nanocrystallites embedded in interfacial carbon and defective SiC.
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References
Schier V (1991) Diplomarbeit Universität Karlsruhe
Fella R (1992) Doktorarbeit Universität Karlsruhe (KfK report-5021, 1992)
Holleck H (1991) Surface Engineering 7:137
Schier V, Michel H-J, Holleck H, Halbritter J, Hornetz B (to be published)
Darlinski A, Halbritter J (1987) Surf Interf Anal 10:223, (1987) J Vac Sci Techn A5:1235 and (1987) Fresenius Z Anal Chem 329:266
Leiste H, Halbritter J, Mathes H-J, Walk P, Winter H (1988) Solid State Comm 68:1061; Halbritter J, Leiste H, Mathes H-J, Walk P (1991) Fresenius J Anal Chem 341:320
Galuska AA et al (1988) J Vac Sci Technol A6:110
Johannson LI et al (1977) J Electron Spectrosc Rel Phen 10:259
Grischke M Thesis (Chemie, Universität Hamburg, 1989 as: VDI-Fortschrittsberichte Nr. 179, VDI-Verlag, 1989) and Köberle H, Grischke M, Thieme F, Benndorf C (1989) Surf and Coating Techn 39/40:275
Desimoni E et al (1990) Surf Interf Anal 15:627
Porte L (1986) J Appl Phys 60:635
Byrne AS et al (1989) Amorphous and Crystalline Silicon Carbide and Related Materials II. Springer, Berlin Heidelberg New York, p 80
Pu Sen Wang et al (1991) J Materials Science 26:1655; Wen-Yaung Lee (1980) J Appl Phys 51:3365
Soraru GD et al (1990) J Mater Res 5:1958
Belton DN et al (1989) Appl Phys Lett 54:416
Halbritter J (1988) J Mater Res 3:506
Wertheim GK et al (1980) Solid State Comm 33:1127 and (1991) Science 252:1419
Yano T et al (1991) MRS-Spring Meeting, Symposium C
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Schier, V., Michel, H.J. & Halbritter, J. ARXPS-analysis of sputtered TiC, SiC and Ti0.5Si0.5C layers. Fresenius J Anal Chem 346, 227–232 (1993). https://doi.org/10.1007/BF00321420
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DOI: https://doi.org/10.1007/BF00321420