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Nonlinear Dynamics of Resonant Microelectromechanical System (MEMS): A Review

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Mechanical Sciences

Abstract

Nonlinearity plays an important role in the dynamics of microelectromechanical resonator. On the one hand, presence of nonlinearity may lead to poor performance of the device. On the other hand, the same nonlinear terms can improve other characteristics of the system. Nonlinearity is, thus, sometimes unwanted while at the other occasions is welcome. Whatever be the reason is, nonlinear dynamics of MEMS device, especially resonator, needs further understanding. In this review work, different aspects of nonlinear dynamics of a single-degree-of-freedom MEMS resonators are discussed. Not only deterministic response under various kinds of excitation, but also noise characteristics of the nonlinear system have been scrutinized. Different methods, which are mostly of recent origin, of tailoring nonlinearity in MEMS resonators have been reviewed. Care has been taken to present a complete picture of the nonlinear dynamics of the simplest type of resonator, namely, the one which can be modelled as a single-degree-of-freedom oscillator.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Indian Institute of Technology Kharagpur, Kharagpur, India

    G. Chakraborty & Nikul Jani

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  1. G. Chakraborty
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  2. Nikul Jani
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Correspondence to G. Chakraborty .

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Editors and Affiliations

  1. Department of Mechanical Engineering, Indian Institute of Technology Guwahati, Guwahati, India

    Uday S. Dixit

  2. Department of Mechanical Engineering, Indian Institute of Technology Guwahati, Guwahati, India

    Santosha Kumar Dwivedy

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Chakraborty, G., Jani, N. (2021). Nonlinear Dynamics of Resonant Microelectromechanical System (MEMS): A Review. In: Dixit, U., Dwivedy, S. (eds) Mechanical Sciences. Springer, Singapore. https://doi.org/10.1007/978-981-15-5712-5_3

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  • DOI: https://doi.org/10.1007/978-981-15-5712-5_3

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