Abstract
This paper describes the performance comparison of various cantilever structures (tapered-shaped, angled-T-shaped, A-shaped) that can be utilized in a piezoelectric energy harvester (PEH) applications. For proper selection of the material, a comparison is made among different piezoelectric materials and it is observed that for capturing low-frequency range Lead Zirconate Titanate (PZT-5H) is a better choice. All cantilever structures discussed in the paper are designed using same materials, i.e., PZT-5H as the piezoelectric layer, single crystal silicon for the structural layer and the proof-mass, and gold as the top and bottom electrode. All the structures possess equal thicknesses for these layers. The performance of all the PEHs is evaluated on the basis of parameters such as resonant-frequency, piezoelectric voltage, maximum displacement, and von-Mises stress. The angled-T-shaped cantilever beam structure generates a piezoelectric voltage of 4.63 V at the resonant-frequency of 419.36 Hz on the application of 1 g acceleration and proves to be the most suitable cantilever beam among all the three designs for acquiring ambient low-frequency.
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The authors wish to gratefully acknowledge DRDO, New Delhi for providing financial support to this project.
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Saxena, N., Sharma, R., Sharma, K.K., Sharma, V. (2020). Design and Performance Analysis of Different Structures for Low-Frequency Piezoelectric Energy Harvester. In: Nath, V., Mandal, J. (eds) Nanoelectronics, Circuits and Communication Systems. NCCS 2018. Lecture Notes in Electrical Engineering, vol 642. Springer, Singapore. https://doi.org/10.1007/978-981-15-2854-5_5
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