Abstract
On the nanometer scale or the molecular level the boundaries between physics, chemistry, biology, medical and engineering science seem to disappear and all the disciplines have a common center of research. A deeper knowledge of the life-processes in biology a more detailed understanding in chemistry, medical science and genetics as well as of the growth of novel materials and its characterization in material science demands tools with highest — in particular cases atomic — lateral resolution.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
G. Binnig and H. Rohrer. Scanning tunneling microscopy. Helv. Phys. Acta, 55: 726, 1982.
G. Binnig, C. F. Quate, and C. Gerber. Atomic Force Microscope. Phys. Rev. Lett., 56: 930–933, 1986.
N. D. Lang. STM Imaging of Single-Atom Adsorbates on Metals. In Wiesen-danger, R. and Güntherodt, H.-J., editor, Scanning Tunneling Microscopy III, pages 7–21. Springer, Berlin, 1993.
G. Doyen. The scattering theoretical approach to the Scanning Tunneling Microscope. In Wiesendanger, R. and Güntherodt, H.-J., editor, Scanning Tunneling Microscopy III, pages 22–50. Springer, Berlin, 1993.
J. Tersoff. Theory of Scanning Tunneling Microscopy. In D. A. Bonnell, editor, Scanning Tunneling Microscopy and Spectroscopy, pages 31–50. VCH Publishers, New York, 1993.
Y. Kuk. STM on Metals. In Güntherodt, H.-J. and Wiesendanger, R., editor, Scanning Tunneling Microscopy I, pages 17–38. Springer, Berlin, 1994.
D. A. Bonnell. Scanning Tunneling Microscopy and Spectroscopy. VCH, New York, 1993.
R. J. Hamers. Methods of tunneling spectroscopy with the STM. In D. A. Bonnell, editor, Scanning Tunneling Microscopy and Spectroscopy, pages 51–99. VCH, New York, 1993.
G. Rohrer. The Preparation of Tip and Sample Surfaces for STM. In D. A. Bonnell, editor, Scanning Tunneling Microscopy and Spectroscopy, pages 155–188. VCH Publishers, New York, 1993.
D. Sarid. Scanning Force Microscopy. Oxford University Press, New York, 1991.
E. Meyer. Atomic force microscopy. Surf. Sci., 41: 3, 1992.
N. A. Burnham and R. J. Colton. Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope. J. Vac. Sci. Technol., A7: 2906, 1989.
D. Rugar, H. J. Mamin, and P. Guethner. Improved fiber-optic interferometer for atomic force microscopy. Appl. Phys. Lett., 55: 2588, 1989.
S. R. Cohen. An evaluation of the use of atomic force microscope for studies in nanomechanics. Ultramicroscopy, 42–44: 66, 1992.
Y. Martin, D. W. Abraham, and H. K. Wickramasinghe. High-resulution capacitance measurement and potentiometry by force microscopy. Appl. Phys. Lett., 52: 1103–1105, 1988.
Y. Huang and C. C. Williams. Quantative two-dimensional dopant profile measurement and inverse modelling vy scanning capacitance microscopy. Appl. Phys. Lett., 66 (3): 344–346, 1995.
Y. Huang and C. C. Williams. Direct comparison of cross-sectional scanning capacitance microscopy and vertical secondary ion-mass spectroscopy profile. J. Vac. Sci. Technol. B, 14 (1): 433–436, 1996.
D. W. Pohl, W. Denk, and M. Lanz. Optical stethoscopy: image recording with resolution λ/20. Appl. Phys. Lett., 44: 651–653, 1984.
D. W. Pohl, U. Ch. Fischer, and U. T. Duerig. Scanning near-field optical microscopy (SNOM): basic principles and some recent developments. SPIE, 897: 84–90, 1988.
E. Betzig and J. K. Trautman. Polarization contrast in near-field scanning optical microscopy. Applied Optics, 31: 4563–4568, 1992.
U. Ch. Fischer and M. Zapletal. The concept of a coaxial tip as a probe for scanning near field optical microscopy and steps towards a realisation. Ultramicroscopy, 42–44: 393–398, 1992.
A. Majumdar, J. P. Carrejo, J. Lai, and M. Chandrachood. Thermal imaging of electronic materials and devices using the atomic force microscope. SPIE Vol., 1855: 209–217, 1993.
R. Heiderhoff, P. Koschinski, M. Maywald, L. J. Balk, and P. K. Bachmann. Correlation of the electrical, thermal, and optical properties of CVD diamond films by scanning microscopy techniques. Diamond Rel. Mater., 4: 645–651, 1995.
Y. Martin and H. K. Wickramasinghe. Magnetic imaging by “force microscopy” with 1000 Å resolution. Appl. Phys. Lett., 50: 1455–1457, 1987.
R. Wiesendanger. Scanning Probe Microscopy and Spectroscopy. Cambridge University Press, 1994.
P. Grütter, E. Meyer, H. Heinzelmann, L. Rosenthaler, H. R. Hidber, and H. J. Güntherodt. Application of atomic force microscopy to magnetic materials. J. Vac. Sci. Technol., A6: 279, 1988.
M. Tortonese, H. Yamada, R.C. Barett, and C. F. Quate. Atomic Force Microscopy using a piezoresistive Cantilever. IEEE, 91CH2817–5: 448, 1991.
M. Tortonese, R.C. Barett, and C. F. Quate. Atomic resolution with Atomic Force Microscope using piezoresistive detection. Appl. Phys. Lett., 62 (8): 834, 1993.
F. Sauter. Festkörperprobleme II. Vieweg & Sohn, 1963.
Y. Kanda. A graphical representation of the piezoresistance coefficients in silicon. IEEE, 29,1: 64, 1982.
M. W. J. Prins, R. H. M. Groenveld, D. L. Abraham, and H. van Kempen. Naer-field magneto-optical imaging in scanning tunneling microscopy. Appl. Phys. Lett., 66 (9): 1141–1143, 1995.
A. M. Chang, H. D. Hallen, L. Harriott, H. F. Hess, H. L. Kao, J. Kwo, E. R. Miller, R. Wolfe, J. van der Ziel, and T. Y. Chang.. Appl. Phys. Lett., 61: 1974, 1992.
C. Mihalcea, W. Scholze, S. Werner, S. Münster, E. Oesterschulze, and R. Kassing. Multi-Purpose Sensor Tips for Scanning Nearfield Microscopy. Accepted for publication in Appl. Phys. Lett., 1996.
A. Leyk, C. Böhm, D. van der Weide, and E. Kubalek. 104 GHz Signals Measured by a High Frequency Scanning Force Microscope Testsystem. Electron. Lett., 31 (13): 1046–1047, 1995.
M. Stopka, L. Hadjiiski, E. Oesterschulze, and R. Kassing. Surface investigations by scanning thermal microscopy. JVST B, 13: 2153–2156, 1995.
E. Oesterschulze and M. Stopka. Photothermal Imaging by Scanning Thermal Microscopy. accepted for publication in J. Vac. Sci. Technol. A, 1996.
E. Oesterschulze and M. Stopka. Imaging of thermal properties and topography by scanning thermal and scanning tunneling microscopy. Microelectr. Eng., 31: 241–248, 1996.
E. Oesterschulze, M. Stopka, L. Hadjiiski, and R. Kassing. Investigation of Surfaces with Miniaturized Thermal Probes. In O. Marti and R. Möller, editor, Photons and Local Probes, pages 345–350. Kluwer Academic Publishers, 1995.
M. Maywald, R. J. Pylkki, and L. J. Balk. Imaging of local thermal and electrical conductivity with scanning force microscopy. Scanning Microsc., 8: 181–188, 1994.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1997 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Kassing, R., Oesterschulze, E. (1997). Sensors for Scanning Probe Microscopy. In: Bhushan, B. (eds) Micro/Nanotribology and Its Applications. NATO ASI Series, vol 330. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5646-2_3
Download citation
DOI: https://doi.org/10.1007/978-94-011-5646-2_3
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6381-4
Online ISBN: 978-94-011-5646-2
eBook Packages: Springer Book Archive