Abstract
The thermal conductivity of chemical vapour deposition diamond films is controlled by the microstructure, impurity content and carbon double bonds in the films. In high conductivity films, dislocation scattering is dominant at low temperatures, while phonon-phonon scattering limits the conductivity at room temperature. In lower quality films, hydrogen and metal impurities as well as carbon double bonds constrain the conductivity up to room temperature. Significant anisotropics and gradients in the thermal conductivity exist in some films because of their micro structure.
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References
Anthony, T. R., Banholzer, W. F., Fleischer, J. F., Wei, L., Kuo, P. K., Thomas, R. L. & Pryor, R. W. 1990 Thermal diffusivity of isotopically enriched 12C diamond. Phys. Rev. B 42, 1104–1111.
Anthony, T. R., Fleischer, J. F., Olson, J. R. & Cahill, D. G. 1991 The thermal conductivity of isotopically enriched polycrystalline diamond films. J. appl. Phys. 69, 8122–8125.
Anthony, T. R. & Banholzer, W. F. 1992 Properties of diamond with varying isotopic composition. Diamond Related Mater. 1, 717–726.
Baba, K., Aikawa, Y. & Shohata, N. 1991 Thermal conductivity of diamond films. J. appl. Phys. 69, 7313–7315.
Berman, R. & Martinez, M. 1976 The thermal conductivity of diamond. In Diamond Research ,pp. 7–13. (Suppl. to Ind. Diamond Rev.)
Berman, R. 1992 The thermal conductivity of isotopically enriched diamonds. Phys. Rev. B 45, 5726–5728.
Bray, J. W. & Anthony, T. R. 1991 On the thermal conductivity of diamond under changes to its isotopic character. Z. Phys. B: Condensed Matter 84, 51–57.
Field, J. E. 1979 The properties of diamond. London: Academic Press.
Graebner, J. E., Mucha, J. A., Seibles, L. & Kammlott, G. W. 1992a The thermal conductivity of cvd diamond films on silicon. J. appl. Phys. 71, 3143–3146.
Graebner, J. E., Jin, S., Kammlott, G. W., Herb, J. A. & Gardinier, C. F. 19926 Unusually high thermal conductivity in diamond films. Appl. Phys. Lett. 60, 1576–1578.
Graebner, J. E., Jin, S., Kammlott, G. W., Bacon, B., Seibles, L. & Banholzer, W. F. 1992c Anisotropic thermal conductivity in cvd diamond. J appl. Phys. 71, 5353–5356.
Hass, K. C., Tamor, M. A., Anthony, T. R. & Banholzer, W. F. 1992 Lattice dynamics and Raman spectra of isotopically mixed diamond. Phys. Rev. B 45, 7171–7182.
Hinneberg, H. J., Eck, M. & Schmidt, K. 1992 Hot-filament-grown diamond films on Si: characterization of impurities. Diamond Related Mater. 1, 810–813.
Holloway, H., Hass, K. C., Tamor, M. A., Anthony, T. R. & Banholzer, W. F. 1991 Isotopic Dependence of the Lattice Constant of Diamond. Phys. Rev. B 44, 7123–7126.
Kittel, C. 1960 Introduction to solid state physics. New York: John Wiley & Sons.
Klemens, P. G. 1958 Lattice thermal conductivity. Solid State Phys. 7, 1–98.
Klemens, P. G. 1981 Thermal conductivity of pure monoisotopic silicon. Int. J. Thermophys. 2, 323–330.
Morelli, D. T., Beetz, C. P. & Perry, T. A. 1988 Thermal conductivity of synthetic diamond films. J. appl. Phys. 64, 3063–3068.
Morelli, D. T., Smith, G. W., Heremans, J., Banholzer, W. F. & Anthony, T. R. 1991a Thermal properties of diamond single crystals with varying isotopic composition. In New Diamond Science and Technology (ed. R. Messier, J. T. Glass, J. E. Butler & R. Roy), pp. 869–873. Pittsburgh: Materials Research Society.
Morelli, D. T., Hartnett, T. M. & Robinson, C. J. 1991b Phonon-defect scattering in high thermal conductivity diamond films. Appl. Phys. Lett. 59, 2112–2114.
Nepsha, V. I., Grinberg, V. R., Klyuyev, Y. A., Naletov, A. M. & Bokii, G R. 1991 The role of elastic interactions of phonons in diamond. Dokl. Akad. Nauk. SSSR 317, 96–97.
Onn, D. G., Witek, A., Qiu, Y. Z., Anthony, T. R. & Banholzer, W. F. 1992 Some aspects of the thermal conductivity of isotopically enriched diamond single crystals. Phys. Rev. Lett. 68, 2806–2809.
Ono, A., Baba, T., Funamoto, H. & Nishikawa, A. 1986 Jap. J. appl. Phys. 25, L808–L810.
Pomeranchuk, I. 1942 On the thermal conductivity of dielectrics at temperatures lower than that of Debye. J. Phys. USSR 6, 237–250.
Solomons, T. W. G. 1980 Organic chemistry 2nd edn. New York: John Wiley & Sons.
Wild, Ch., Herres, N., Wagner, J., Koidl, P. & Anthony, T. R. 1989 Optical and structural characterization of cvd diamond. Proc. electrochem. Soc. 89 (12), 283.
Wild, Ch., Herres, N. & Koidl, P. 1990 Texture formation in polycrystalline diamond films. J. appl. Phys. 68, 973–978.
Wilks, J. & Wilks, E. 1991 Properties and applications of diamond. Oxford: Butterworth-Heinemann.
Ziman, J. M. 1963 Electrons and phonons: the theory of transport phenomena in solids. Oxford: Clarendon Press.
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Anthony, T.R. (1994). The thermal conductivity of cvd diamond films. In: Lettington, A.H., Steeds, J.W. (eds) Thin Film Diamond. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0725-9_6
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DOI: https://doi.org/10.1007/978-94-011-0725-9_6
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