Skip to main content
SpringerLink
Log in

Kinetic and Surface Aspects of MBE

  • Chapter
Molecular Beam Epitaxy and Heterostructures

Part of the book series: NATO ASI Series ((NSSE,volume 87))

Abstract

Surface kinetic data relating to the growth of thin films of III-V compounds and alloys by MBE can be obtained using modulated beam techniques. Data acquisition and signal processing methods are described, and application to the study of Ga-As4 and Ga-As2 surface reactions presented in detail. The evaluation of composition control during growth of both mixed Group III and mixed Group V element alloys is also discussed.

Some consequences on film properties of the differing surface chemistry involved in growth from Group V element tetramers compared with dimers are considered in relation to possible reaction mechaniums. The evaluation of the surface crystallographic and electronic structure of differently reconstructed GaAs(00l) surfaces using RHEED, ARPES and core level spectroscopy is briefly reviewed.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J. R. Arthur, J. Appl. Phys. 394032 (1968).

    Article  CAS  Google Scholar 

  2. R. H. Jones, D. K. Olander, W. J. Siekhaus and J. A. Schwarz, J. Vac. Sci. Technol. 91429 (1972).

    Article  CAS  Google Scholar 

  3. J. A. Schwarz and R. J. Madix, Surf. Sci. 46317 (1974).

    Article  CAS  Google Scholar 

  4. C. T. Foxon, M. R. Boudry and B. A. Joyce, Surf. Sci. 4469 (1974).

    Article  CAS  Google Scholar 

  5. J. W. Cooley and J. W. Tukey, Math. Comp. 19297 (1965).

    Article  Google Scholar 

  6. C. T. Foxon, J. A. Harvey and B. A. Joyce, J. Phys. Chem. Sol. 341693 (1973).

    Article  CAS  Google Scholar 

  7. J. H. Neave, P. Blood and B. A. Joyce, Appl. Phys. Lett. 36311 (1980).

    Article  CAS  Google Scholar 

  8. J. R. Arthur, Structure and Chemistry of Solid Surfaces, ed. G. A. Somorjai ( Wiley, New York, 1969 ) 46 - 1.

    Google Scholar 

  9. C. T. Foxon and B. A. Joyce, Surf. Sci. 64293 (1977).

    Article  CAS  Google Scholar 

  10. C. T. Foxon and B. A. Joyce Surf. Sci. 50434 (1975)

    Article  CAS  Google Scholar 

  11. H. Kiinzel, J. Knecht, H. Jung, K. Wiinstel and K. Ploog, Appl. Phys. A28167 (1982)

    Google Scholar 

  12. H. Kiinzel and K. Ploog, Appl. Phys. Lett. 37416 (1980).

    Article  Google Scholar 

  13. P. J. Dobson, G. B. Scott, J. H. Neave and B. A. Joyce, Solid State Commun. 43917 (1982).

    Article  CAS  Google Scholar 

  14. C. T. Foxon, P. Dawson, G. Duggan and G. W.’t Hooft, Proc. 2nd Intern. Meeting on MBE, Tokyo, (Japan. Soc. Appl. Phys.) 81 (1982).

    Google Scholar 

  15. J. H. Neave and B. A. Joyce, J. Crystal Growth 44387 (1978).

    Article  CAS  Google Scholar 

  16. P. K. Larsen, J. H. Neave and B. A. Joyce, J. Phys. C. 14167 (1981).

    Google Scholar 

  17. P. J. Dobson, J. H. Neave and B. A. Joyce, Surf. Sci. 119L339 (1982)

    Article  CAS  Google Scholar 

  18. P. K. Larsen, J. F. van der Veen, A. Mazur, J. Pollman, J. H. Neave and B. A Joyce, Phys. Rev. B263222 (1982).

    Google Scholar 

  19. J. Pollmann and S. T. Pantelides, Phys. Rev. B185524 (1978)

    Google Scholar 

  20. D. J. Chadi, C. Tanner and J. Ihm, Surf. Sci. 120L425(1982).

    Article  CAS  Google Scholar 

  21. R. Z. Bachrach, R. S. Bauer, P. Chioradia and G. V. Hansson, J. Vac. Sci. Technol. 19335 (1981).

    CAS  Google Scholar 

  22. P. K. Larsen, J. H. Neave, J. F. van der Veen, P. J. Dobson and B. A. Joyce, Phys. Rev. B, 27, 4966 (1983).

    Article  Google Scholar 

  23. C. T. Foxon and B. A. Joyce, J. Crystal Growth 4475 (1978).

    Article  CAS  Google Scholar 

  24. D. V. Morgan, H. Ohno, C. E. C. Wood, L. F. Eastman and J. D. Berry, J. Electrochem. Soc. 1282419 (1981).

    CAS  Google Scholar 

  25. T. C. Chiang, R. Ludeke and D. E. Eastman, Phys. Rev. B256518 (1982).

    Google Scholar 

  26. A. R. Miedema, Philips Tech. Rev. 38257 (1978/79).

    Google Scholar 

  27. R. E. Honig and D. A. Kramer, RCA Rev. 30285 (1969).

    CAS  Google Scholar 

  28. C. T. Foxon, J. A. Harvey and B. A. Joyce, J. Phys. Chem. Sol. 341693 (1973).

    Article  CAS  Google Scholar 

  29. C. T. Foxon, private communication.

    Google Scholar 

  30. J. R. Arthur and J. J. Lepore, J. Vac. Sci. Technol. 6545 (1969).

    Article  Google Scholar 

  31. C. T. Foxon B. A. Joyce and M. T. Norris, J. Cryst. Growth 49132 (1980).

    Article  CAS  Google Scholar 

  32. C. A. Chang, R. Ludeke, L. L. Chang and L Esaki., Appl. Phys. Lett 31759 (1977).

    Article  CAS  Google Scholar 

  33. K. Woodbridge, J. P. Gowers and B. A. Joyce, J. Cryst. Growth 6021 (1982), quoting unpublished results of C. T. Foxon

    Article  CAS  Google Scholar 

  34. M. Ilegems, M. B. Panish and J. R. Arthur, J. Chem. Thermodynamics 6157 (1974).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Philips Research Laboratories, Redhill, Surrey, England

    B. A. Joyce

Authors
  1. B. A. Joyce
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. IBM T.J. Watson Research Center, Yorktown Heights, 10598, NY, USA

    Leroy L. Chang

  2. Max-Planck-lnstitute, D-7000, Stuttgart 80, Germany

    Klaus Ploog

Rights and permissions

Reprints and permissions

Copyright information

© 1985 Martinus Nijhoff Publishers, Dordrecht

About this chapter

Cite this chapter

Joyce, B.A. (1985). Kinetic and Surface Aspects of MBE. In: Chang, L.L., Ploog, K. (eds) Molecular Beam Epitaxy and Heterostructures. NATO ASI Series, vol 87. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-5073-3_2

Download citation

  • DOI: https://doi.org/10.1007/978-94-009-5073-3_2

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-8744-5

  • Online ISBN: 978-94-009-5073-3

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation