Abstract
HFeCo3(CO)12 and CpFeCo(CO)6 have been employed as vapor phase reagents in the chemical vapor deposition of amorphous, homogeneous, coherent mixed-metal and mixed-metal oxide thin films of Fe and Co. Film thickness can be controlled as a function of time with the stoichiometry of the films reflecting the metal ratio of the starting organo-transition metal complexes.
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Luberhoff, B. J. in opening remarks at meeting of Industrial Engineering Section A during Pall 1985 National Meeting of the American Chemical Society.
Bryant, W. A.; J. J. Mater. Sci. 12, 1285 (1977).
Gupta, D. C; Wang, P. Solid State Technol. 11, 48 (1977).
Spear, K. private communication.
Thompson, J. E. The Magnetic Properties of Materials, Great Britain: CRC Press (1968).
Edelman, P. H. “The Preparation and Characterization of Thin Ferromagnetic Films, U. S. Departments of Commerce, Report No. PB151525, 1958.
Halaby, S. A.; Kenny, N. S.; Murphy, J. A. U.S. Patent 3 892 888.
Chen, S.-L.; Murphy, J. A. U.S. Patent 3 859 129.
For example, Linare, R. C; McGraw, R. B.; Schroeder, J. B. J. Appl. Phys. 36, 2884 (1965).
For example, Nagasawa, Ki, Banda, Y.; Takada, T. Japn. J. Appl. Phys. 7, 174 (1978).
Chini, P.; Colli, L.; Deraldo, M. Gazz. Chim. Ital. 90, 1005 (1960).
Madach, T.; Vahrenkamp, H. Chem. Ber. 113, 2675 (1980).
Kaplin, Y. A.; Belysheva, G. V.; Zhipsov, S. F.; Domrachev, G. A.; Chernyshava, L. S. Zhurnal. Obschei Khimi 50, 118 (1980).
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© 1988 Martinus Nijhoff Publishers
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Czekaj-Korn, C.L., Geoffroy, G.L. (1988). Chemical Vapor Deposition of Fe-Co Thin Films from Fe-Co Organometallic Clusters. In: Laine, R.M. (eds) Transformation of Organometallics into Common and Exotic Materials: Design and Activation. NATO ASI Series, vol 141. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1393-6_13
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DOI: https://doi.org/10.1007/978-94-009-1393-6_13
Publisher Name: Springer, Dordrecht
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