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Tellurium Thin Films in Sensor Technology

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Nanotechnological Basis for Advanced Sensors

Abstract

An extensive review of the application of tellurium thin films in sensor technology is reported and discussed. Along with the traditional use of Te films in photo and strain sensitive devices, their modern application in chemical gas sensors is considered in detail. Fabrication parameters such as the technology of preparation, the substrate material, the thickness and morphology of the samples are shown to influence the response to gases. The effect of these parameters as well as that of temperature and thermal treatments on sensitivity, response and recovery times is discussed with respect to the structural evolution of the films, studied by SEM, XRD and XPS analyses. Further, the characterization of Te thin films for the detection of NO2, NH3and H2S as well as their cross-sensitivity to the main components of the atmosphere (O2, N2and H2O vapor) at different temperatures is given. The sensing mechanism is explained and the state of the art in the development of Te-based gas sensors operating at room temperature is considered.

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Authors and Affiliations

  1. Department of Physics, Technical University of Moldova, bul. Dacia 41, MD-2060, Chisinau, Moldova

    Dumitru Tsiulyanu

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  1. Dumitru Tsiulyanu
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Correspondence to Dumitru Tsiulyanu .

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Editors and Affiliations

  1. , Inst. of Nanostructure Tech. & Analytics, University of Kassel, Heinrich-Plett-Str. 40, Kassel, 34132, Germany

    Johann Peter Reithmaier

  2. , Faculty of Technology and Metallurgy, University "Sts. Cyril and Methodius", Rugjer Boskovic 16, Skopje, 1000, Macedonia

    Perica Paunovic

  3. , Dept. of Mathematics and Natural Science, University of Kassel, Heinrich-Plett-Str. 40, Kassel, 34132, Germany

    Wilhelm Kulisch

  4. , Inst. of Nanostructure Technologies and, University of Kassel, Heinrich-Plett-Str. 40, Kassel, 34132, Germany

    Cyril Popov

  5. Technology & Metallurgy, Dept. Physics, University of Chemical, St. Kliment Ohridski Blvd. 8, Sofia, 1756, Bulgaria

    Plamen Petkov

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Tsiulyanu, D. (2011). Tellurium Thin Films in Sensor Technology. In: Reithmaier, J., Paunovic, P., Kulisch, W., Popov, C., Petkov, P. (eds) Nanotechnological Basis for Advanced Sensors. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-0903-4_38

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