Abstract
A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.
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References
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© 1992 Springer-Verlag Wien
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Bastin, G.F., Dijkstra, J.M., Heijligers, H.J.M., Klepper, D. (1992). Quantitative Electron Probe Microanalysis of Multi-layer Structures. In: Boekestein, A., Pavićević, M.K. (eds) Electron Microbeam Analysis. Mikrochimica Acta, vol 12. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6679-6_6
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DOI: https://doi.org/10.1007/978-3-7091-6679-6_6
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-82359-0
Online ISBN: 978-3-7091-6679-6
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