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Definition
A scanning electron microscope (SEM) is an instrument for imaging topography and for obtaining material information of conductive specimen using a focused beam of high-energy electrons. The electron beam is deflected in a magnetic field and performs a scanning movement in a raster pattern to capture the specimens’ surface. For imaging purposes interaction phenomena of the electron beam with the specimen like emission of secondary electrons (SE) or backscattered electrons (BSE) are detected and converted to grey values. A frequency analysis of X-rays reveals information about the present material. Nonconductive surfaces have to be covered with a conductive layer.
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References
Amelinckx S, van Dyck D, van Landuyt J, van Tendeloo G (1997) Electron microscopy: principles and fundamentals. VHC, Weinheim
Bogner A, Jouneau PH, Thollet G, Basset D, Gauthier C (2007) A history of scanning electron microscopy developments: towards “wet-STEM” imaging. Micron 38:390–401
Egerton RF (2005) Physical principles of electron microscopy: an introduction to TEM, SEM, and AEM. Springer, New York
FEI Company (2016) An introduction to electron microscopy. Retrieved from http://www.fei.com/introduction-to-electron-microscopy/. Accessed 20 Jan 2016
Goldstein J (2003) Scanning electron microscopy and x-ray microanalysis. Kluwer Academic/Plenum, New York
Hafner B (2007) Scanning electron microscopy primer. Retrieved from http://www.charfac.umn.edu/instruments/sem_primer.pdf. Accessed 20 Jan 2016
Hansen HN, Carneiro K, Haitjema H, De Chiffre L (2006) Dimensional micro and nano metrology. CIRP Ann Manuf Technol 55(2):721–743
McMullan D (1993) Scanning electron microscopy 1928–1965. Retrieved from http://www-g.eng.cam.ac.uk/125/achievements/mcmullan/mcm.htm. Accessed 20 Jan 2016
Oatley CW (1982) The early history of the scanning electron microscope. J Appl Phys 53(2):R1–R13
Reimer L (1998) Scanning electron microscopy: physics of image formation and microanalysis. Springer, Berlin/Heidelberg
Smith KCA (1997) Charles Oatley: a pioneer of the SCM. Retrieved from http://www2.eng.cam.ac.uk/∼bcb/cwo1.htm. Accessed 20 Jan 2016
von Ardenne M (1938) Das Elektronen-Rastermikroskop [the scanning electron microscope]. Z Phys 109(9–10):553–572
Zworykin VA, Hillier J, Snyder RL (1942) A scanning electron microscope. ASTM Bull 117:15–23
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Schmitt, R. (2019). Scanning Electron Microscope. In: Chatti, S., Laperrière, L., Reinhart, G., Tolio, T. (eds) CIRP Encyclopedia of Production Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-53120-4_6595
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