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A New Time-of-Flight Instrument for SIMS and Its Application to Organic Compounds

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Secondary Ion Mass Spectrometry SIMS IV

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

Abstract

For the e/m-analysis of secondary ions, different types of mass spectrometers with considerable differences concerning their mass range, their transmission and their dynamic range, have been applied. An important aspect which determines the choice of an appropriate mass analyzer in SIMS is the quantity of sample material that is available. It determines the total number of secondary ions that can be produced. This may be an extremely low number, if e.g. in static SIMS, only a fraction of one monolayer in the bombarded target area of some 0.01 cm2 is allowed to be sputtered during an experiment [1].

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References

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Authors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, Münster, D-4400, Fed. Rep. of Germany

    P. Steffens, E. Niehuis, T. Friese, D. Greifendorf & A. Benninghoven

Authors
  1. P. Steffens
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  2. E. Niehuis
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  3. T. Friese
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  4. D. Greifendorf
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  5. A. Benninghoven
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Steffens, P., Niehuis, E., Friese, T., Greifendorf, D., Benninghoven, A. (1984). A New Time-of-Flight Instrument for SIMS and Its Application to Organic Compounds. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_105

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_105

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

  • eBook Packages: Springer Book Archive

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