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Tribology in Nanomanufacturing—Interaction between Nanoparticles and a Solid Surface

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Advanced Tribology

Abstract

Nanomanufacturing is a new area brought up in recent years, which is defined by NSF (The National Science Foundation, USA) as encompassing all processes aimed toward building of nanoscale (in 1D, 2D, or 3D) structures, features, devices, and systems suitable for integration across higher dimensional scales (micro-, meso- and macroscale) to provide functional products and useful services. Nanomanufacturing includes both bottom-up and top-down processes. Tribology becomes very important in nanomanufacturing, particularly in process of chemical mechanical material removal, contact printing, assembly and joining, scanning probe lithography etc. In the present paper, the characteristic of liquids in a nano-gap, the collision, adsorption, and desorption of nano-particles with a solid surface, and the surface modification in nanofacturing have been discussed.

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Author information

Authors and Affiliations

  1. State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China

    Jianbin Luo & Dan Guo

Authors
  1. Jianbin Luo
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  2. Dan Guo
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Editor information

Editors and Affiliations

  1. State Key Laboratory of Tribology Tsinghua University, 100084, Beijing, China

    Jianbin Luo , Yonggang Meng , Tianmin Shao  & Qian Zhao , ,  & 

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© 2009 Tsinghua University Press, Beijing and Springer-Verlag Berlin Heidelberg

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Luo, J., Guo, D. (2009). Tribology in Nanomanufacturing—Interaction between Nanoparticles and a Solid Surface. In: Luo, J., Meng, Y., Shao, T., Zhao, Q. (eds) Advanced Tribology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-03653-8_3

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  • DOI: https://doi.org/10.1007/978-3-642-03653-8_3

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-03652-1

  • Online ISBN: 978-3-642-03653-8

  • eBook Packages: EngineeringEngineering (R0)

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