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Single-Walled Carbon Nanotube Sensor Concepts

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Springer Handbook of Nanotechnology

Part of the book series: Springer Handbooks ((SHB))

Abstract

Carbon nanotubes are nanocomponents par excellence that offer unique properties to be exploited in next-generation devices. Sensing applications are perhaps the class that has most to gain from single-walled carbon nanotubes (SWNTs); virtually any property of SWNTs (e.g., electronic, electrical, mechanical, and optical) can result or has already resulted in sensor concept demonstrators. The basic questions that this chapter will attempt to address are: why use SWNTs, and how can SWNTs be used in sensing applications? A tour through the gallery of basic nanotube properties is used to reveal the richness and uniqueness of this materialʼs intrinsic properties. Together with examples from the literature showing performance of SWNT-based sensors at least comparable to (and sometimes surpassing) that of state-of-the-art micro- or macrodevices, these nanotube properties should explain why so much effort is currently being invested in this field. Because nanotubes, like any other nanoobject, are not easy to probe, a versatile strategy for accessing their properties, via the carbon nanotube field-effect transistor (CNFET) concept, will be described in this chapter. Fabricating CNFET devices, together with examples of SWNT sensor demonstrators utilizing the CNFET principle, will outline a proposal for how nanotubes can be utilized in sensors.

In Sect. 14.1 design considerations for SWNT sensors are brought into attention, starting with a brief survey of SWNT properties useful for sensing. The CNFET is introduced in Sect. 14.1.2 as a platform enabling access to individual SWNT properties during the sensing process. The current status of CNFET-based sensor characterization is captured in Sect. 14.1.3. Methods for fabricating, or supporting the fabrication of, SWNT FETs are reviewed in Sect. 14.2. Finally, Sect. 14.3 will be devoted to examples of CNT-based sensors, encompassing three main case studies, namely (bio)chemical, piezoresistive, and resonator sensors.

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Abbreviations

AC:

alternating-current

AC:

amorphous carbon

AFM:

atomic force microscope

AFM:

atomic force microscopy

CCVD:

catalytic chemical vapor deposition

CMOS:

complementary metal–oxide–semiconductor

CNFET:

carbon nanotube field-effect transistor

CNT:

carbon nanotube

DC:

direct-current

DGU:

density gradient ultracentrifugation

DOS:

density of states

DWNT:

double-walled CNT

EBL:

electron-beam lithography

GF:

gauge factor

ITRS:

International Technology Roadmap for Semiconductors

LoD:

limit-of-detection

MEMS:

microelectromechanical system

MWNT:

multiwall nanotube

PMMA:

poly(methyl methacrylate)

SAM:

scanning acoustic microscopy

SAM:

self-assembled monolayer

SB:

Schottky barrier

SGS:

small-gap semiconducting

SNR:

signal-to-noise ratio

SWNT:

single wall nanotube

SWNT:

single-wall nanotube

TMS:

tetramethylsilane

TMS:

trimethylsilyl

ULSI:

ultralarge-scale integration

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Authors and Affiliations

  1. Micro and Nanosystems Department of Mechanical and Process Engineering, ETH Zurich, 8092, Zurich, Switzerland

    Cosmin Roman

  2. Micro and Nanosystems Department of Mechanical and Process Engineering, ETH Zurich, 8092, Zurich, Switzerland

    Thomas Helbling

  3. Micro and Nanosystems Department of Mechanical and Process Engineering, ETH Zurich, 8092, Zurich, Switzerland

    Christofer Hierold

Authors
  1. Cosmin Roman
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  2. Thomas Helbling
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  3. Christofer Hierold
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Corresponding authors

Correspondence to Cosmin Roman , Thomas Helbling or Christofer Hierold .

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Editors and Affiliations

  1. Ohio State University, Nanoprobe Laboratory for Bio- and Nanotechnology and Biomimetics (NLB2), 201 W. 19th Avenue, 43210-1142, Columbus, OH, USA

    Bharat Bhushan

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Roman, C., Helbling, T., Hierold, C. (2010). Single-Walled Carbon Nanotube Sensor Concepts. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_14

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  • DOI: https://doi.org/10.1007/978-3-642-02525-9_14

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