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Surface Modification Using Reactive Landing of Mass-Selected Ions

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Ion Beams in Nanoscience and Technology

Part of the book series: Particle Acceleration and Detection ((PARTICLE))

Abstract

Collisions of ions with surfaces play an important role in a variety of scientific disciplines, including surface science, materials science, mass spectrometry, imaging, and spectroscopy. Ion-surface collision phenomena are broadly used in many analytical methods and surface modification techniques, including secondary ion mass spectrometry (SIMS) [1–3], chemical imaging [4], ion scattering spectrometry [5], surface-induced dissociation (SID) [6–8], ion soft landing [9, 10], growth and modification of thin films [11], and formation of three-dimensional nanostructures [12]. Physical phenomena that occur during ion-surface collisions have been extensively reviewed [9–11]. These include physisorption or ion deposition, elastic and inelastic scattering, chemical reactions, charge exchange, sputtering, and ion implantation.

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Authors and Affiliations

  1. Pacific Northwest National Laboratory, Fundamental Science Directorate, 99352, Richland, WA, USA

    Peng Wang

  2. Fundamental Science Division, Pacific Northwest National Laboratory, 99352, Richland, WA, USA

    Julia Laskin

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  1. Peng Wang
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Editors and Affiliations

  1. Inst. Technology, University of Lund, Lund, 221 00, Sweden

    Ragnar Hellborg

  2. Dept. Physics, University of Jyväskylä, Jyväskylä, 40014, Finland

    Harry J. Whitlow

  3. Pacific Northwest National Laboratory, Richland, 99352, U.S.A.

    Yanwen Zhang

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Wang, P., Laskin, J. (2009). Surface Modification Using Reactive Landing of Mass-Selected Ions. In: Hellborg, R., Whitlow, H., Zhang, Y. (eds) Ion Beams in Nanoscience and Technology. Particle Acceleration and Detection. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-00623-4_3

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