Abstract
X-ray microscope is an useful tool in biology because of the advantages of an inherent contrast mechanism. The performance of an x-ray microscope depends on the quality of its zone plates. The requirements for zone plate material are 1) x-ray absorptivity, 2) mechanical strength, and 3) ease of fine pattern fabrication. Hitherto, zone plates have usually been fabricated by electroplating of Au [1–3]. However, large diameter freestanding zone plates with high resolution have not been fabricated due to their low mechanical strength and complicated fabrication process. Recently we have developed an x-ray mask with Ta absorber for fine pattern replication [4]. Tantalum can meet the requirements for the free-standing zone plate material.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
G. Schmahl, D. Rudolph, P. Guttmann, and O. Christ: In X-Ray Microscopy, ed. by G. Schmahl and D. Rudolph, Springer-Verlag, Berlin, p.63, Vol.43 (Series in Optical Sciences 1983 )
D.P. Kern, P.J. Houzero, P.J. Coane, and T.H.P. Chang: J. Vac. Sci. Technol., Vol. B1, p. 1096, 1983
H. Aritome, H. Aoki, and S. Namba: Jpn. J. Appl. Phys., p. L406, 1984
M. Sekimoto, A. Ozawa, T. Ohkubo and H. Yoshihara: Extend Abstracts of 16th Conference on Solid Devices and Materials, Kobe, p. 23, 1984
Y. Kagoshima, S. Aoki, M. Kakuchi, M. Sekimoto, H. Maezawa, K. Hyodo, and M. Ando: A zone plate soft x-ray microscope using undulator radiation at the photon factory (this volume)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1988 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Sekimoto, M., Ozawa, A., Ohkubo, T., Yoshihara, H., Kakuchi, M., Tamamura, T. (1988). X-Ray Zone Plate with Tantalum Film for an X-Ray Microscope. In: Sayre, D., Kirz, J., Howells, M., Rarback, H. (eds) X-Ray Microscopy II. Springer Series in Optical Sciences, vol 56. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-39246-0_32
Download citation
DOI: https://doi.org/10.1007/978-3-540-39246-0_32
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-14490-9
Online ISBN: 978-3-540-39246-0
eBook Packages: Springer Book Archive