Feature Selection Techniques for Improving Rare Class Classification in Semiconductor Manufacturing Process

Abstract

In order to enhance the performance, rare class prediction are to need the feature selection method for target class-related feature. Traditional data mining algorithms fail to predict rare class, as the class imbalanced data models are inherently built in favor of the majority of class-common characteristics among data instances. In the present paper, we propose the Euclidean distance- and standard deviation-based feature selection and over-sampling for the fault detection prediction model. We study applying the semiconductor manufacturing process control in fault detection prediction. First, the features calculate the MAV (Mean Absolute Value) median values. Secondly, the MeanEuSTDEV (the mean of Euclidean distance and standard deviation) are used to select the most appropriate features of the classification model. Third, to address the rare class over-fitting problem, oversampling is used. Finally, learning generates the fault detection prediction data-mining model. Furthermore, the prediction model is applied to measure the performance.