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Improvement of Ferroelectrics Properties of Lead-Free Thin Films by Sol Gel Process Optimization

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Sensors and Microsystems (AISEM 2020)

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 753))

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Abstract

This work deals with the optimization of lead-free piezoelectric/ferroelectrics oxides thin films fabrication process. Such films, with formula 0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) (BZT-BCT), were deposited on Pt/TiOx/SiO2/Si wafers. The thin films fabrication process by sol-gel process consists of repeated chemical solution deposition routes, whose spin coating and heating parameters were optimized to reduce the residual stresses that are the major cause of cracking in the films. The results indicated that 250 nm thick films were obtained with limited presence of cracks and improved ferroelectric properties because of the enhanced morphological properties of the deposited layers.

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Authors and Affiliations

  1. Analog, MEMS and Sensors Group STMicroelectronics, Via Remo De Feo, 1, 80022, Arzano, Italy

    V. Casuscelli & R. Scaldaferri

  2. Dipartimento di ingegneria Chimica, dei Materiali e della Produzione Industriale, Piazzale Vincenzo Tecchio, 80, 80125, Napoli, Italy

    P. Aprea, P. S. Barbato & D. Caputo

Authors
  1. V. Casuscelli
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  2. R. Scaldaferri
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  3. P. Aprea
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  4. P. S. Barbato
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  5. D. Caputo
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Corresponding author

Correspondence to V. Casuscelli .

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Editors and Affiliations

  1. ENEA, Portici, Italy

    Girolamo Di Francia

  2. Department of Electronic Engineering, University of Rome Tor Vergata, Roma, Italy

    Corrado Di Natale

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Casuscelli, V., Scaldaferri, R., Aprea, P., Barbato, P.S., Caputo, D. (2021). Improvement of Ferroelectrics Properties of Lead-Free Thin Films by Sol Gel Process Optimization. In: Di Francia, G., Di Natale, C. (eds) Sensors and Microsystems. AISEM 2020. Lecture Notes in Electrical Engineering, vol 753. Springer, Cham. https://doi.org/10.1007/978-3-030-69551-4_4

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  • DOI: https://doi.org/10.1007/978-3-030-69551-4_4

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-69550-7

  • Online ISBN: 978-3-030-69551-4

  • eBook Packages: EngineeringEngineering (R0)

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