Abstract
Electron probe microanalysis makes use of the X-ray spectrum emitted by a solid sample bombarded with a focused beam of electrons to obtain a localized chemical analysis. All elements from atomic number 4 (Be) to 92 (U) can be detected in principle, though not all instruments are equipped for ‘light’ elements (Z < 10). Qualitative analysis involves the identification of the lines in the spectrum and is fairly straightforward owing to the simplicity of X-ray spectra. Quantitative analysis (determination of the concentrations of the elements present) entails measuring line intensities for each element in the sample and for the same elements in calibration standards of known composition.
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References
Albee, A.L. and Chodos, A.A. (1970) Semiquantitative electron microprobe determination of Fe2+/Fe3+ and Mn2+/Mn3+ in oxides and silicates and its application to petrologic problems. Am. Mineral., 55, 491–501.
Albee, A.L. and Ray, L.A. (1970) Correction factors for electron probe microanalysis of silicates, oxides, carbonates, phosphates, and sulfates. Anal. Chem., 42, 1408–14.
Armstrong, J.T. (1988a) Bence-Albee after 20 years: review of the accuracy of α-factor correction procedures for oxide and silicate minerals, in Microbeam Analysis — 1988 (ed. D.E. Newbury), San Francisco Press, San Francisco, pp. 469–76.
Armstrong, J.T. (1988b) Accurate quantitative analysis of oxygen and nitrogen with a W/Si multilayer crystal, in Microbeam Analysis — 1988 (ed. D.E. Newbury), San Francisco Press, San Francisco, pp. 301–4.
Bastin, G.F. and Heijligers, H.J.M. (1990) Quantitative electron probe microanalysis of ultralight elements (boron-oxygen). Scanning, 12, 225–36.
Bastin, G.F., van Loo, F.J.J. and Heijligers, H.J.M. (1984) Evaluation and use of Gaussian φ(pz) curves in quantitative electron probe microanalysis: a new optimization. X-ray Spectrom., 13, 91–7.
Bence, A.E. and Albee, A.L. (1968) Empirical correction factors for the electron microanalysis of silicates and oxides. J. Geol., 76. 382–403.
Castaing, R. (1951) PhD Thesis. University of Paris.
Doyle, B.L., Chambers. W.F., Christensen, T.M., et al. (1979) Sin θ settings for X-ray spectrometers. Atomic Data Nuclear Data Tab., 24, 373–493.
Dunham, A.C. and Wilkinson, F.C.F. (1978) Accuracy, precision and detection limits of energy-dispersive electron-microprobe analyses of silicates. X-ray Spectrom., 7. 50–5.
Heinrich, K.F.J. (1987) Mass absorption coefficients for electron probe microanalysis. in Proc. 11th ICXOM (eds J.D. Brown and R.H. Packwood), University of Western Ontario, London, Ontario, pp. 67–119.
Jenkins, R., Manne, R., Robin, J. and Senemaud, C. (1991) Part VIII. Nomenclature system for X-ray spectroscopy. Pure and Applied Chemistry, 63, 735–46.
Love, G., Sewell, D.A. and Scott, V.D. (1984) An improved absorption correction for quantitative analysis. J. Physique, 45 (coll. C2), 21–4.
McGee J.J., Slack, J.F. and Herrington, C.R. (1991) Boron analysis by electron microprobe using MoB4C layered synthetic crystals. Am. Mineral., 76, 681–4.
Nash, W.P. (1992) Analysis of oxygen with the electron microprobe: applications to hydrated glasses and minerals. Amer. Mineral., 77, 453–7.
O’Nions, R.K. and Smith, D.G.W. (1971) Investigations of the LII.III X-ray emission spectra of Fe by electron microprobe. Part 2. The Fe LII.III spectra of Fe and Fe-Ti oxides. Amer. Mineral., 56, 1452–63.
Packwood, R.H. and Brown, J.D. (1981) A Gaussian expression to describe φ(pz) curves for quantitative electron probe microanalysis. X-ray Spectrom., 10, 138–46.
Philibert, J. (1963) A method of calculating the absorption correction in electron-probe microanalysis, in X-ray Optics and X-ray Microanalysis (eds H.H. Pattee, V.E. Cosslett and A. Engström), Academic Press, New York, pp. 379–92.
Potts, P.J. and Tindle, A.G. (1989) Analytical characteristics of a multilayer dispersion element (2d = 60 Å) in the determination of fluorine in minerals by electron microprobe. Mineral Mag., 53, 357–62.
Pouchou, J.L. and Pichoir, F. (1987) Basic expression of ‘PAP’ computation for quantitative EPMA, in Proc. 11th ICX0M (eds J.D. Brown and R.H. Packwood), University of Western Ontario, London, Ontar o., pp. 249–53.
Pouchou, J.L. and Pichoir, F. (1988) A simplified version of the ‘PAP’ model for matrix corrections in EPMA, in Microbeam Analysis — 1988 (ed. D.E. Newbury), San Francisco Press, San Francisco, pp. 315–18.
Reed, S.J.B. and Ware, N.G. (1975) Quantitative electron microprobe analysis of silicates using energy-dispersive X-ray spectrometry. J. Petrol., 16, 499–519.
Rock, N.M.S. and Carroll, G.W. (1990) MINTAB: a general purpose mineral recalculation and tabulation program for Mac computers. Am. Mineral., 75, 424–30.
Roeder, P.L. (1985) Electron-microprobe analysis of minerals for rare-earth elements: use of calculated peak-overlap corrections, Can. Mineral., 23, 263–71.
Ware, N.G. (1991) Combined energy-dispersive-wavelength-dispersive quantitative electron probe analysis, X-ray Spectrom., 20, 73–9.
Further reading
Agarwal, B.K. (1991) X-ray Spectroscopy, 2nd edn. Springer-Verlag, Berlin.
Goldstein, J.I., Newbury, D.E., Echlin, P. et al. (1992) Scanning Electron Microscopy and Analysis, 2nd edn. Plenum Press, New York.
Heinrich, K.F.J. (1981) Electron Beam X-ray Micro analysis. Van Nostrand Rheinhold, New York.
Heinrich, K.F.J. and Newbury, D.E. (eds) (1991) Electron Probe Quantitation, Plenum Press, New York.
Potts, P.J. (1987) A Handbook of Silicate Rock Analysis, Blackie, Glasgow.
Reed, S.J.B. (1993) Electron Microprobe Analysis, 2nd edn, Cambridge University Press, Cambridge.
Reimer, L. (1985) Scanning Electron Microscopy, Springer-Verlag, Berlin.
Russ, J.C. (1984) Fundamentals of Energy Dispersive X-ray Analysis, Butterworths, London.
Scott, V.D. and Love, G. (1994) Quantitative Electron Probe Microanalysis, 2nd edn., Ellis Horwood, Chichester.
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© 1995 The Mineralogical Society
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Reed, S.J.B. (1995). Electron probe microanalysis. In: Potts, P.J., Bowles, J.F.W., Reed, S.J.B., Cave, M.R. (eds) Microprobe Techniques in the Earth Sciences. The Mineralogical Society Series, vol 6. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-2053-5_2
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DOI: https://doi.org/10.1007/978-1-4615-2053-5_2
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