Skip to main content

Acoustic Microscopy Analysis of Microelectronic Interconnection and Packaging Technologies

  • Chapter
Advances in Acoustic Microscopy

Part of the book series: Advances in Acoustic Microscopy ((AAMI,volume 1))

Abstract

Several advanced packaging and interconnection technologies are currently under development to meet the requirements of complex, large and/or high-speed microelectronic integrated circuits (IC) and systems. These include the design of multilayer interconnection substrates (see Fig. 1.1) for Multichip Module (MCM) applications(1) and the development of multilayer ceramic pin grid array packages (see Fig. 1.2) for large-area die size, high pin count ICs.(2) A development road map(3) for single-chip packaging technologies is presented in Fig. 1.3.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

eBook
USD 16.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 16.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Reche, J. J. (1990). Fabrication of high-density multichip modules. IEEE Trans. Components Hybrids Manuf Technol. 13(3)565–69.

    Article  Google Scholar 

  2. Chantraine, P., Chandler, N., Brandenburger, J., Chilo, J., de Maquillé Y., Ó Mathtina, S. C., Koschnick, W., Bargain, R., Dümcke, R. (1992). In: Proceedings Annual ESPRIT Conference, Commission of the European Communities, Brussels, Belgium, pp. 101–111.

    Google Scholar 

  3. Reichl, H. Packaging aspects of single-and multichip modules. Proceedings 1st European Conference on Electronic Packaging Technology (EuPac 1994), Essen, German Welding Society, Dusseldorf, Germany, Feb. 1994, pp. 6–9.

    Google Scholar 

  4. Briggs, G. A. D. (1992). Acoustic Microscopy, Oxford University Press, Oxford, UK.

    Google Scholar 

  5. Quate, C. F., Atalar, A., Wickramasinghe, H. L. (1979). Acoustic microscopy with mechanical scanning—a review. Proc.. IEEE 67, 1092–1114.

    Article  Google Scholar 

  6. BRITE-EURAM Project no. 4398 (0000). Ceramic evaluation using microacoustic waves (C-MAW).

    Google Scholar 

  7. European Space Agency Contract MTSL 018 (Acoustic Microscopy)

    Google Scholar 

  8. Buda, L. R., Gedney, R. W., Kelley, T. F. (1992). High-density packaging: future outlook. Proceedings 42d Electronic Components and Technology Conference, San Diego, IEEE, New York, pp. 36–41.

    Google Scholar 

  9. Kelly, G., Lyden, C., Ó Mathúna, S. C., Barrett, J., Exposito, J., Pape, H. (1993). Development and use of numerical modelling tools for advanced packaging technologies—a European perspective. Presented at Annual Winter Meeting of ASME, New Orleans.

    Google Scholar 

  10. White, G. L. (1985). An introduction to die attach. Welding Institute Research Bulletin,pp. 268–271.

    Google Scholar 

  11. Mil-Std-883C Method-2030 (1987). Ultrasonic Inspection of Die Attach. Notice 5, US Dept. of Defense, Washington, DC.

    Google Scholar 

  12. Heinen, K. G., Schroen, W. H., Edwards, D. R., Wilson, A. M., Stierman, R. J., Lamson, M. A. (1989). Multichip assembly with flipped integrated curcuits. Proceedings Electronic Components Conference, IEEE, New York, pp. 672–80.

    Google Scholar 

  13. Packaging takes on a new dimension. European Semiconductor Production,21–22.

    Google Scholar 

  14. Groothius, S., Schroen, W., Murtuza, M. (1985). Computer-aided stress modelling for optimising plastic package reliability. 23d Annual Proc. IEEE International Reliability Physics Symposium, New York, pp. 184–91.

    Google Scholar 

  15. Ó Mathiúna, S. C., Fromont, T., Koschnick, W., O’Connor, L. (1993). Test Chips, Test Systems and Thermal Test Data for Multichip Modules in the ESPRIT-APACHIP Project, IEEE Transactions on Components, Packaging and Manufacturing Technology, Part A, 17(3). IEEE, New York, pp. 117–126.

    Google Scholar 

  16. Tummala, R. R., and Rymaszewski, E. J. (1989). Microelectronics Packaging Handbook,Van Nostrand Reinhold, New York.

    Google Scholar 

  17. Mil-Std-883C Method 1014.5 (1983). Seal. U.S. Dept. of Defense, Washington, DC.

    Google Scholar 

  18. Flannery, J., Crean, G. M., O’Mathuna, S. C. (1992). In: Acoustical Imaging, vol. 19, Plenum Press, New York, pp. 717–21.

    Chapter  Google Scholar 

  19. Crean, G. M., Zhang, D., Flannery, J., and O’Mathuna, S. C. (1992). In: Proceedings 14th International Conference on Acoustics (Li Peizi, ed.), Beijing, pp. L5–1.

    Google Scholar 

  20. Nongaillard, B., Rouvaen, J. M., Logette, P., Bridoux, E., Torquet, R. (1986). Zooming lens for acoustic microscopy applications. J. Appl. Phys. 59, 3028–32.

    Article  Google Scholar 

  21. Atalar, A. and Koymen, H. (1989). A high-efficiency Lamb wave lens for subsurface imaging. Proceedings IEEE Ultrasonics Symposium,IEEE, New York, pp. 813–16.

    Google Scholar 

  22. Zhang, D. and Crean, G. M. (1991). Shear wave imaging for deep nondestructive evaluation. Electr. Lett. 27(24), 2248–49.

    Article  Google Scholar 

  23. Zhang, D. and Crean, G. M. (1992). Deep subsurface imaging using shear wave mode acoustic microscopy. Proceedings Institute of Physics (IOP) Conference on Developments in Acoustics and Ultrasonics (M. Povey and D. J. Clements, eds.), IOP Publishing, Bristol, UK, pp. 215–18.

    Google Scholar 

  24. Zhang, D. and Crean, G. M. (1992). Calculation of the focussed acoustic shear wave field in a ceramic substrate. Proceedings of the 14th International Conference on Acoustics (Li Peizi, ed.), Beijing, pp. L5–3.

    Google Scholar 

  25. Zhang, D. and Crean, G. M. (1993). Shear wave imaging using an annular lens. Appl. Phys. Lett. 62(3), 318–20.

    Article  Google Scholar 

  26. IPC-SM-786 Standard (1991). Impact of moisture on plastic IC package cracking; and IPC-Test Method 650–2.6.20 (1991). Plastic surface mount component cracking. Institute for Interconnecting and Packaging Electronic Circuits (IPC), Lincolnwood, IL.

    Google Scholar 

  27. Moore, T. M. and Kelsall, S. J. (1992). The impact of delamination on stress-induced and contamination-related failure in surface mount ICs. Proceeding IEEE International Reliability Physics Symposium, IEEE, New York, pp. 169–76.

    Google Scholar 

  28. Van Doorselaer, K., Hente, A., Saboui, A., Moscicki, J. P. (1993). Thin type packaging: an effective way to improve the popcorn resistance of plastic-packaged ICs. Proceedings IEEE International Reliability Physics Symposium,IEEE, New York, pp. 244–49.

    Google Scholar 

  29. Moore, T. M. (1992). C-Mode acoustic microscopy applied to integrated-circuit-package inspection. Solid-State Electron. 35(3), 411–21.

    Article  Google Scholar 

  30. Van Doorselaer, K., Moore, T. M., Tiziani, R., Baelde, W. (1992). Evaluation of methods for delamination detection by acoustic microscopy in plastic-packaged integrated circuits. Proceedings 18th International Symposium for Testing and Failure Analysis, ASM International, Ohio, pp. 425–31.

    Google Scholar 

  31. Shook, R. L. and Conrad, T. R. (1993). Accelerated life performance of moisture-damaged plastic surface mount devices. Proceedings IEEE International Reliability Physics Symposium, IEEE, New York, pp. 227–35.

    Google Scholar 

  32. van Gestel, R., de Zeeuw, K., van Gemert, L., Bagerman, E. (1992). Comparison of delamination effects between temperature-cycling test and highly accelerated stress test in plastic-packaged devices. Proceedings IEEE International Reliability Physics Symposium, IEEE, New York, pp. 177–81.

    Google Scholar 

  33. Brekhovskikh, L. M. (1980). Waves in Layered Media, 2d ed., Academic Press, New York.

    Google Scholar 

  34. Kelly, G., Lyden, C., O’Mathúna, S. C., Campbell, J. S. (1992). Investigation of thermomechanically induced stress in a PQFP 160 using finite element techniques. In: Proceedings 42d Electronic Components and Technology Conference (ECTC), IEEE, New York, pp. 467–72.

    Google Scholar 

  35. Mirasole, M. J. (1988). In: Proceedings of the International Symposium for Testing and Failure Analysis (ISTFA), ASM International, Materials Park, Ohio, pp. 77–88.

    Google Scholar 

  36. Kessler, L. W., Semmens, J. E., Agramonte, F. (1985). Nondestructive die attach bond evaluation comparing scanning laser acoustic microscopy (SLAM) and X-radiography. In: Proceedings of the Electronics Component Conference. IEEE, New York, pp. 250–58.

    Google Scholar 

  37. Semmens, J. E. and Kessler, L. W. (1991). Application of acoustic microimaging to the evaluation of multichip modules (MCM). In: Proceedings of the Technical Program of the Surftwe Mount International Conference, Surface Mount International, Edina, Minnesota, pp. 44–52.

    Google Scholar 

  38. Siettmann, J., Dias, R., Fiebelkorn, K. (1992). In: Proceedings of the International Reliability Physics Symposium, IEEE New York, pp. 309–14.

    Google Scholar 

  39. Flannery, J., and Crean, G. M. (1990). Scanning acoustic microscopy of multilayer interconnect structures. In: Proceedings Symposium International Society for Hybrid Microelecronics, ISHM, Reston, Virginia, pp. 358–63.

    Google Scholar 

  40. Zakel, E., Azdasht, G., Reichl, H. (1991). Investigations of laser-soldered TAB inner lead contacts. IEEE Trans. on Components, Hybrids, and Manufacturing Technology, 14(4), 672–79.

    Article  CAS  Google Scholar 

  41. Teoh, H., McGeary, M., Ling, J. (1990). Laser/Infrared evaluation of TAB inner lead bond integrity. Proceedings Electronic Components and Technology Conference, IEEE, New York, pp. 442–49.

    Google Scholar 

  42. Semmens, J. E. and Kessler, L. W. (1990). Nondestructive evaluation of TAB outer lead bonding using acoustic microscopy. Proceedings International Society for Hybrid Microelectronics Symposium, ISHM, Reston, Virginia, pp. 644–51.

    Google Scholar 

  43. Scharr, T. A. and Nagarkar, M. D. (1989). Outer lead and die bond reliability in high-density TAB. Proceedings Electronics Components Conference,IEEE, New York, pp. 177–83.

    Google Scholar 

  44. Lau, J. H., Rice, D. W., Harkins, C. G. (1989). Thermal stress analysis of tape-automated bonding packages and interconnections. Proceedings Electronics Components Conference, IEEE New York, pp. 456–63.

    Google Scholar 

  45. Flannery, C. M., Crean, G. M., O’Mathuna, S. C. (1994). In: Proceedings of 1st European Conference on Electronic Packaging Technology (EuPac ‘94), Essen, Germany.

    Google Scholar 

  46. Zhang, D. and Crean, G. M. (1991). In: Proceedings Materials Research Society Symposium, vol. 239, Materials Research Society, Pittsburgh, pp. 281–86.

    Google Scholar 

  47. Segmulleller, A., and Murakami, M. (1988). In: Treatise on Materials Science and Engineering, vol. 27 (H. Herman, ed.), pp. 143–200. Academic Press, New York.

    Google Scholar 

  48. Pethica, J. B. and Oliver, W. C. (1990). In: Proceedings of the Materials Research Society Symposium, vol. 130, Materials Research Society, Pittsburgh, pp. 13–17.

    Google Scholar 

  49. Flinn, P. A. (1990). In: Proceedings of the Materials Research Society Symposium, vol. 130, Materials Research Society, Pittsburgh, pp. 41–51.

    Google Scholar 

  50. Crean, G. M., Golanski, A., Oberlin, J. C. (1989). Effective elastic constants of thin-film tungsten silicide from surface acoustic wave analysis. Appl. Phys. Lett. 50(2), 74–76.

    Article  Google Scholar 

  51. Crean, G. M. (1990). In: Proceedings 14th Conference on Scanning Microscopy in Materials Testing, pp. 55–67. DVM, Berlin.

    Google Scholar 

  52. Flannery, C. M., Flaherty, T., Zhang, D., Cundill, R. T., Crean, G. M. (1993). In: Proceedings of the International Conference on Advanced Materials (ICAM), Symposium on Nondestructive Evaluation of Materials, Tokyo, Elsevier, Amsterdam.

    Google Scholar 

  53. Alper, T., Challis, R. E., Crean, G. M., Zhang, D. (1992). Longitudinal and shear ultrasonic velocities in AIN, Al2O3, and SIC ceramics. Proceedings Institute of Physics (IOP) Conference on Developments in Acoustics and Ultrasonics, pp. 209–214, (M. Povey and D. J. Clements, eds.) IOP Publishing, Bristol, UK.

    Google Scholar 

  54. Oishi, M., Noguchi, K., Murayama, K. (1990). Measurement of elastic constants of ceramics by a scanning laser acoustic microscope. JSME International Journal, Series 1 33(1), 96–100.

    CAS  Google Scholar 

  55. Mihara, T., and Obata, M. (1992). Elastic constant measurement using line-focus-beam acoustic microscope. Ever. Mech. 32(1), 30–33.

    Article  Google Scholar 

  56. Rowe, J. M. (1987). Quantitative acoustic microscopy of surfaces. Ph.D. diss., Oxford University.

    Google Scholar 

  57. Flannery, C. M., Flaherty, T., Zhang, D., Cundill, R. T., Crean, G. M. (1994). In: Proceedings of 1st European Conference on Electronic Packaging Technology (EuPac ‘94), Essen, German Welding Society, Dusseldorf, Germany, pp. 160–164.

    Google Scholar 

  58. Flaherty, T., Lynch, S., Kelly, P. V., O’Keeffe, M., Cundill, R. T., Crean, G. M. (1993). In: Proceedings of the International Conference on Advanced Materials, Symposium on Fabrication of Silicon-Based Ceramics, Tokyo, Elsevier, Amsterdam.

    Google Scholar 

  59. Kubota, J., Okada, H., Musha, Y., Takishita, Y., Iwasaki, A., Saski, S. (1988). Electronic scanning of 25-MHz ultrasound for imaging IC packages. IEEE Ultrasonics Symposium, IEEE, New York, pp. 767–70.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1995 Springer Science+Business Media New York

About this chapter

Cite this chapter

Crean, G.M., Flannery, C.M., Ó Mathúna, S.C. (1995). Acoustic Microscopy Analysis of Microelectronic Interconnection and Packaging Technologies. In: Briggs, A. (eds) Advances in Acoustic Microscopy. Advances in Acoustic Microscopy, vol 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1873-0_1

Download citation

  • DOI: https://doi.org/10.1007/978-1-4615-1873-0_1

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5762-9

  • Online ISBN: 978-1-4615-1873-0

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics