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Quantifying Benefits of Resolution and Count Rate in EDX Microanalysis

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X-Ray Spectrometry in Electron Beam Instruments

Abstract

A student of energy dispersive x-ray microanalysis soon learns that it is better to have a spectrometer with improved resolution because it is easier to recognize individual characteristic lines from different elements. However, a spectrum obtained in a few seconds can appear “ragged,” and random distortion of peak shapes can confuse the distinction between single peaks and overlapping multiplets. Thus, the student learns that it is also important to obtain good counting statistics by increasing beam current or by extending the acquisition time so that the spectrum is not too ragged in appearance.

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References

  1. P. Statham, X-Ray Spectrom. 6, 94 (1977).

    Article  CAS  Google Scholar 

  2. P. Statham, X-Ray Spectrom. 5, 16 (1976).

    Article  CAS  Google Scholar 

  3. F. H. Schamber, in: Proceedings of the Symposium on X-Ray Fluorescence Analysis of Environmental Samples (T. Dzubay, ed.) Ann Arbor Science, Ann Arbor, MI, pp. 241–257 (1977).

    Google Scholar 

  4. P. J. Statham, Anal. Chem. 49, 2149 (1977).

    Article  CAS  Google Scholar 

  5. P. L. Ryder, in: Scanning Electron Microscopy/1977, ITT Research Institute, Chicago, Illinois, pp. 273–280 (1977).

    Google Scholar 

  6. P. J. Statham, in: Microbeam Analysis-1982 (K. F.J. Heinrich, ed.) San Francisco Press, San Francisco, pp. 1–4 (1982).

    Google Scholar 

  7. P. J. Statham and T. Nashashibi, in: Microbeam Analysis-1988 (D. E. Newbury, ed.) San Francisco Press, San Francisco, pp. 50–54 (1988).

    Google Scholar 

  8. C. E. Fiori and C. R. Swyt, Microbeam Anal. 1, 89 (1992).

    CAS  Google Scholar 

  9. C. E. Lyman, J. J. Goldstein, D. B. Williams, D. W. Ackland, S. von Harrach, A. W. Nichols, and P. J. Statham, Microbeam Anal. 2, S234 (1993).

    Google Scholar 

  10. D. McCammon, W. Cui, M. Juda, J. Morgenthaler, J. Zhang, R. L. Kelley, S. S. Holt, G. M. Madejski, S. H. Moseley, and A. E. Azymkowiak, Nucl. Instrum Methods A326, 157 (1993).

    CAS  Google Scholar 

  11. J. I. Goldstein and D. B. Williams, Microbeam Anal. 1, 29 (1992).

    Google Scholar 

  12. T. O. Zeibold, Anal. Chem. 39, 858 (1967).

    Article  Google Scholar 

  13. S. J. B. Reed, Electron Microprobe Analysis, Second Ed., Cambridge University Press, Cambridge, UK, p. 166 (1993).

    Google Scholar 

  14. S. J. B. Reed, Micro beam Analysis-1990 (J. R. Michael and Peter Ingram, eds.) San Francisco Press, San Francisco, pp. 181–184 (1990).

    Google Scholar 

  15. G. G. Guest, Numerical Methods of Curve Fitting, Cambridge University Press, Cambridge, UK, p. 260 (1961).

    Google Scholar 

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© 1995 Springer Science+Business Media New York

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Statham, P.J. (1995). Quantifying Benefits of Resolution and Count Rate in EDX Microanalysis. In: Williams, D.B., Goldstein, J.I., Newbury, D.E. (eds) X-Ray Spectrometry in Electron Beam Instruments. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1825-9_8

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  • DOI: https://doi.org/10.1007/978-1-4615-1825-9_8

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5738-4

  • Online ISBN: 978-1-4615-1825-9

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