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Concentration Evaluation in Nanometre-Sized In x Ga1-x N Islands Using Transmission Electron Microscopy

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Microscopy of Semiconducting Materials 2007

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 120))

Summary

In this work the indium concentration of uncapped InGaN samples is measured by three different transmission electron microscopy approaches which are based on measurement of local lattice plane distances. In the case of three dimensional, nanometre-sized, uncapped InGaN islands, an increase of the indium concentration from the base of the islands toward their tip is observed. Additionally, an indication is presented that the local indium concentration in the islands is influenced by the vicinity of other islands.

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References

  1. Arakawa Y and Sakaki H 1982 Appl. Phys. Lett. 40, 939

    Article  ADS  CAS  Google Scholar 

  2. Vurgaftman I, Meyer J R and Ram-Mohan L R 2001 J. Appl. Phys. 89, 5815

    Article  ADS  CAS  Google Scholar 

  3. Davydov V Y, Klochikhin A A, Emtsev V V, Ivanov S V, Vekshin V V, Bechstedt F, Furthmüller J, Harima H, Mudryi A V, Hashimoto A, Yamamoto A, Aderhold J, Graul J and Haller E E 2002 phys. stat. sol. b 230, R4

    Article  CAS  Google Scholar 

  4. Wu J, Walukiewicz W, Yu K M, Ager III J W, Haller E E, Lu H and Schaff W J 2002 Appl. Phys. Lett. 80, 4741

    Article  ADS  CAS  Google Scholar 

  5. Matsuoka T, Okamoto H, Nakao M, Harima H and Kurimoto E 2002 Appl. Phys. Lett. 81, 1246

    Article  ADS  CAS  Google Scholar 

  6. Vegard L 1921 Z. Phys. 5, 17

    Article  ADS  CAS  Google Scholar 

  7. Rosenauer A, Gerthsen D and Potin V 2006 phys. stat. sol. a 203, 176

    Article  ADS  CAS  Google Scholar 

  8. Coene W M J, Thust A, op de Beeck M and van Dyck D 1996 Ultramicroscopy 64, 109

    Article  CAS  Google Scholar 

  9. Rosenauer A, Kaiser S, Reisinger T, Zweck J and Gebhardt W 1996 Optik 102, 63

    CAS  Google Scholar 

  10. Shimizu M, Kawaguchi Y, Hiramatsu K and Sawaki N 1997 Sol.-Stat. Elektron. 41, 145

    Article  ADS  CAS  Google Scholar 

  11. Zhang J, Hao M, Li P and Chua S J 2002 Appl. Phys. Lett. 80, 485

    Article  ADS  CAS  Google Scholar 

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Pretorius, A., Müller, K., Yamaguchi, T., Kröger, R., Hommel, D., Rosenauer, A. (2008). Concentration Evaluation in Nanometre-Sized In x Ga1-x N Islands Using Transmission Electron Microscopy. In: Cullis, A.G., Midgley, P.A. (eds) Microscopy of Semiconducting Materials 2007. Springer Proceedings in Physics, vol 120. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-8615-1_3

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