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Heavy ion sputtering induced surface topography development

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Sputtering by Particle Bombardment II

Part of the book series: Topics in Applied Physics ((TAP,volume 52))

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Authors
  1. George Carter
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  2. Boris Navinšek
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  3. James L. Whitton
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Rainer Behrish

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Carter, G., Navinšek, B., Whitton, J.L. (1983). Heavy ion sputtering induced surface topography development. In: Behrish, R. (eds) Sputtering by Particle Bombardment II. Topics in Applied Physics, vol 52. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-12593-0_6

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  • DOI: https://doi.org/10.1007/3-540-12593-0_6

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