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Chemical sputtering

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Sputtering by Particle Bombardment II

Part of the book series: Topics in Applied Physics ((TAP,volume 52))

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  1. Joachim Roth
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Rainer Behrish

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© 1983 Springer-Verlag

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Roth, J. (1983). Chemical sputtering. In: Behrish, R. (eds) Sputtering by Particle Bombardment II. Topics in Applied Physics, vol 52. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-12593-0_3

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