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9. References

  1. Canham, L.T. (1990) Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers, Appl. Phys. Lett. 57, 1046.

    Article  ADS  CAS  Google Scholar 

  2. Bondarenko, V.P. and Yakovtseva, V.A. (1997) Optoelectronic applications of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 356.

    Google Scholar 

  3. Koshida, N. and Koyama, H. (1992) Visible electroluminescence from porous silicon, Appl. Phys. Lett. 60, 347.

    Article  ADS  CAS  Google Scholar 

  4. Tsybeskov, L., Duttagupta, S., Hirschman K. and Fauchet, P. (1996) Stable and efficient electroluminescence from a porous silicon-based bipolar device, Appl. Phys. Lett. 68, 2058.

    Article  ADS  CAS  Google Scholar 

  5. Loni, A., Canham, L.T., Berger, M.G., Arens-Fisher, R., Munder, H., Luth, H., Arraud, H.F. and Benson, T.M. (1995) Porous silicon multilayer optical waveguides, Thin Solid Films 276, 143.

    Article  Google Scholar 

  6. M. Balucani, M., Bondarenko, V., Vorozov, N. and Ferrari, A. (2003) Buffer layer influence on guiding properties of oxidized porous silicon waveguides, Physica E: Low Dimensional Syst. Nanostructures 16, 574.

    Article  ADS  CAS  Google Scholar 

  7. Tsai, C., Li, K-H. and Cambell, J. (1993) Photodetectors fabricated from rapid-thermal-oxidized porous Si, Appl. Phys. Lett. 62, 2818.

    Article  ADS  CAS  Google Scholar 

  8. El-Bahar, A. and Namirovsky, Y. (2003) Porous silicon multiplexers and demultiplexers, Guest editors: L.T. Canham, A.G. Nassiopoulou and V. Parkhutik, Phys. Stat. Sol (a) 197, 293.

    Google Scholar 

  9. Reece, P.J., Lerondel, G., Mulders, H., Zheng, W.H. and Gal, M. (2003) Fabrication and tuning of high quality silicon microcavities, Guest editors: L.T. Canham, A.G. Nassiopoulou and V. Parkhutik, Phys. Stat. Sol (a) 197, 321.

    Google Scholar 

  10. Stievenard, D. and Devesmes, D. (1995) Are electrical properties of an aluminum-porous silicon junction governed by dangling bonds?, Appl. Phys. Lett. 67, 1570.

    Article  ADS  CAS  Google Scholar 

  11. Erson, R.C., Muller, R.S. and Tobias, C.W. (1990) Investigations of porous silicon for vapor sensing, Sensors & Actuators 21–23, 835.

    Article  Google Scholar 

  12. Lauerhaas, J.M., Credo, G.M., Heinrich, J.L. and Sailor, M.J. (1992) Reversible luminescence quenching of porous silicon by solvents, J. Am. Chem. Soc. 114, 1911.

    Article  CAS  Google Scholar 

  13. Charrier, J., Pirasteh, P., Pedrono, N., Joubert, P., Haji, L. and Bosc, D. (2003) Thermo-optic properties of oxidized porous silicon impregnated with index-matching liquids for active optical components, Guest editors: L.T. Canham, A.G. Nassiopoulou and V. Parkhutik, Phys. Stat. Sol. (a) 197 (No1), 288.

    Google Scholar 

  14. Memming, R. and Schwandt, G. (1966) Anodic dissolution of silicon in hydrofluoric acid solutions, Surf. Sci. 4, 109.

    Article  CAS  Google Scholar 

  15. Lehmann, V. and Gosele, U. (1991) Porous silicon formation: A quantum wire effect, Appl. Phys. Lett. 58, 856.

    Article  ADS  CAS  Google Scholar 

  16. Gerischer, H. (1990) The impact of semiconductors on the concepts of electrochemistry, Electrochemica Acta 35, 1677.

    Article  CAS  Google Scholar 

  17. Cullis, A.G., (1997) Structure and crystallinity of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 99.

    Google Scholar 

  18. Herino, R. (1997) Pore size distribution in porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 89.

    Google Scholar 

  19. Foll, H. (1991) Properties of silicon-electrolyte junctions and their application to silicon characterization, Appl. Phys. A 53, 8.

    Article  ADS  Google Scholar 

  20. Chazalviel, J.-N., Etman, M. and Ozanam, F. (1991) A voltammetric study of the anodic dissolution of p-Si in fluoride electrolytes, J. Electroanal. Chem., 297, 533.

    Article  CAS  Google Scholar 

  21. Allongue, P. (1997) Porous silicon formation, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 3.

    Google Scholar 

  22. Pagonis, D.N., Kaltsas, G. and Nassiopoulou, A.G. (2004) Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by porous silicon membrane over air cavity, J. Micromech. Microeng. 14, 1.

    Article  Google Scholar 

  23. Nassiopoulou, A.G., Kaltsas, G. and Pagonis, D.N. (2003) Low power silicon thermal flow sensor and microfluidic devices using porous silicon sealed air cavity or microchannels, International patent application PCT GR 03 0003/16.1.2003.

    Google Scholar 

  24. Thonissen, M., Kriger, M., Lerondel, G. and Romestain, R. (1997) Optical applications of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 349.

    Google Scholar 

  25. Canham, L.T., Stewart, M.P., Buriac, J. M., Reeves, C.L., Anderson, M., Squire, E.K., Allcock, P. and Snow, P.A. (2000) Derivatized porous silicon mirrors: Implantable optical components with slow resorbability, Physica Status Solidi (a) 182, 521.

    Article  ADS  CAS  Google Scholar 

  26. Canham, L.T., Houlton M.R., Leong, W.Y., Pickering, C. and Keen J.M. (1990) Atmospheric impregnation of porous silicon at room temperature, J. Appl. Phys. 70, 422.

    Article  ADS  Google Scholar 

  27. Bellet, D. (1997) Drying of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 38.

    Google Scholar 

  28. Belmant, O., Bellet, D. and Brechet, Y. (1996) Study of the cracking of highly porous p+ type silicon during drying, J. Appl. Phys. 79, 7586.

    Article  ADS  Google Scholar 

  29. Amato, G., Bullara, V., Brunetto, N. and Boarino, L. (1996) Drying of porous silicon: a Raman, electron microscopy and photoluminescence study, Thin Solid Films 276, 7586.

    Google Scholar 

  30. Canham, L.T., Cullis, A.G., Pickering, C., Dosser, O.D., Cox, T.I. and Lynch, T.P. (1994) Luminescent anodized silicon aerocrystal networks prepared by supercritical drying, Nature 368, 133.

    Article  ADS  CAS  Google Scholar 

  31. Canham, L.T. (1997) Storage of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 44.

    Google Scholar 

  32. Loni, A. (1997) Capping of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 51.

    Google Scholar 

  33. Kaltsas, G. and Nassiopoulou, A.G. (1997) Application of porous silicon to bulk silicon micromachining, Mat. Res. Soc. Proceed. 459, 349.

    Google Scholar 

  34. Kaltsas, G. and Nassiopoulou, A.G. (1998) Front-side bulk silicon micromachining using porous silicon technology, Sensors & Actuators A 65, 175.

    Article  Google Scholar 

  35. Nassiopoulou, A.G. (1997) Local formation and patterning of porous silicon, in L.T. Canham (Ed.) Properties of Porous Silicon, EMIS Datareview Series, No 18 IEE edition, 77.

    Google Scholar 

  36. Starkov, V.V., Cavrilin, E.Yu., Presting, H., Vyatkin, A.F. and Kong, U. (2003) SU8 photoresist as an etch mask for local deep anodic etching of silicon, Phys. Stat. Sol. (a) 197, 150.

    Article  ADS  CAS  Google Scholar 

  37. Kaltsas, G. and Nassiopoulou, A.G. (1997) Bulk silicon micromachining using porous silicon sacrificial layers, Microel. Engin, 35, 397.

    Article  CAS  Google Scholar 

  38. Kaltsas, G., Nassiopoulou, A.G., Sialavellas, M. and Anastassakis, E. (1998) Stress effect on suspended polycrystalline silicon membranes fabricated by micromachining of porous silicon, Sensors & Actuators A 68, 492.

    Article  Google Scholar 

  39. Kaltsas, G., Pagonis, D.N. and Nassiopoulou, A.G. (2003) Planar CMOS compatible process for the fabrication of buried microchannels in silicon, using porous silicon technology, J. Microelectron. Systems, 12(6), 863.

    Article  CAS  Google Scholar 

  40. Xu, Yong-Ping, Huang, Ruey-Shing, and Rigby G.A. (1993) A silicon-diode-based infrared thermal detector array, Sensors & Actuators A 37–38, 226.

    Article  Google Scholar 

  41. Simon, I., Barsan, N., Bauer, M. and Weimar, U. (2001) Micromachined metal oxide gas sensors: Opportunities to improve sensor performance, Sensors & Actuators B 73, 1.

    Article  Google Scholar 

  42. Nassiopoulou, A.G. and Kaltsas, G. (2000) Porous silicon as an effective material for thermal isolation on bulk crystalline silicon, Phys. Stat. Solidi (a) 182, 307

    Article  ADS  CAS  Google Scholar 

  43. Nassiopoulou, A.G. and Kaltsas, G. (1997) Integrated gas flow sensor based on porous silicon technology, Greek Patent No OBI 1003010, International patent application: PCT/ GR 97/ 00040

    Google Scholar 

  44. Nassiopoulou, A.G. and Kaltsas, G. (1999) Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation, Sensors & Actuators, 76, 133.

    Article  Google Scholar 

  45. Kaltsas, G., Nassiopoulos, A.A. and Nassiopoulou, A.G. (2002) Characterization of a silicon thermal gas flow sensor with porous silicon thermal isolation, IEEE Sensors Journal, 2, 463.

    Article  CAS  Google Scholar 

  46. Pagonis, D.N., Nassiopoulou, A.G. and Kaltsas, G. (2004) Porous silicon membranes over cavity for efficient local thermal isolation in Si thermal sensors, J. Electroch. Soc., 151, 174.

    Article  CAS  Google Scholar 

  47. Dücsázsonyi, é., Ádám, M., Szabó, I., Bársony, I., Gardeniers, J.G.E. and van den Berg, A. (1997) Porous silicon bulk micromachining for thermally isolated membrane formation, Sensors & Actuators A, 60, 235.

    Article  Google Scholar 

  48. Tsamis, C., Tserepi, A. and Nassiopoulou, A.G. (2002) Method for the fabrication of suspended porous silicon microstructures and application in gas sensors, Patent N0 OBI 1004040, PCT application GR02/000008, W003/011747A1.

    Google Scholar 

  49. Tsamis, C., Tserepi, A. and Nassiopoulou, A.G. (2003) Fabrication of suspended porous silicon micro-hotplates for thermal sensor applications, Phys. Stat. Sol. (a) 197, 539.

    Article  ADS  CAS  Google Scholar 

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Nassiopoulou, A.G. (2005). Porous Silicon for Sensor Applications. In: Vaseashta, A., Dimova-Malinovska, D., Marshall, J.M. (eds) Nanostructured and Advanced Materials for Applications in Sensor, Optoelectronic and Photovoltaic Technology. NATO Science Series II: Mathematics, Physics and Chemistry, vol 204. Springer, Dordrecht. https://doi.org/10.1007/1-4020-3562-4_11

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