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Advanced Helium Glow-Discharge Emission Source by Conducting d.c. Self-Bias Current in the 13.56 MHz Radio Frequency Plasma

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References

  1. K. Wagatsuma, Tetsu To Hagane, 85, 34 (1999).

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  2. K. Wagatsuma and H. Matsuta, Spectrochim. Acta Part B (1999) in press.

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  1. Institute for Materials Research, Tohoku University, Katahira, Sendai, 980-8577, Japan

    Hideyuki Matsuta & Kazuaki Wagatsuma

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  1. Hideyuki Matsuta
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  2. Kazuaki Wagatsuma
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Matsuta, H., Wagatsuma, K. Advanced Helium Glow-Discharge Emission Source by Conducting d.c. Self-Bias Current in the 13.56 MHz Radio Frequency Plasma. ANAL. SCI. 15, 319–320 (1999). https://doi.org/10.2116/analsci.15.319

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  • DOI: https://doi.org/10.2116/analsci.15.319

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