Abstract
A modified VERL-process (Vacuum evaporation on running liquids) employing high pressure magnetron sputtering has been used for the preparation of suspensions with metal nanoparticles. The method has been tested for Ag- and Fe-suspensions by varying the pressure of the Argon sputtering atmosphere in the range of 1 to 30 Pa. A narrow particle size distribution with a mean particle size ranging from 5-18 nm has been found. The mean particle size increases with increasing Argon pressure in the pressure range under investigation. A descriptive model for the process of particle formation as a function of sputtering gas pressure is given.
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Acknowledgement
Financial support of the german federal ministry of education and research (BMBF) under contract no 03N 2004 D is gratefully acknowledged. One of us (BSM) would like to thank the german DFG for funding his research fellowship in Germany.
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Wagener, M., Murty, B.S. & Günther, B. Preparation of Metal Nanosuspensions by High-Pressure DC-Sputtering on Running Liquids. MRS Online Proceedings Library 457, 149–154 (1996). https://doi.org/10.1557/PROC-457-149
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DOI: https://doi.org/10.1557/PROC-457-149