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Study of Thin Film Ferroelectric Superlattices

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The study of ferroelectric thin films has evoked special interest owing to their numerous applications. In this study, epitaxial or highly oriented PbTiO3/PLT (Lead Titanate / La modified Lead Titanate) ferroelectric superlattice thin films were grown by the metalorganic chemical vapor deposition (MOCVD) technique. Compositional modulation by Secondary Ion Mass Spectroscopy (SIMS) established the nature of these films as desirable for high quality device applications. The thickness and the refractive index of each film was determined by using a prism coupler. The dielectric behavior of these films was studied as a function of frequency.

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Authors and Affiliations

  1. School of Physics; School of Materials Science & Engineering, Georgia Institute of Technology, Atlanta, GA, 30332, USA

    Y. Kim, A. Erbil, E. W. Thomas, A. Kushwaha & R. Gerhardt

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  1. Y. Kim
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  2. A. Erbil
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  3. E. W. Thomas
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  4. A. Kushwaha
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  5. R. Gerhardt
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Kim, Y., Erbil, A., Thomas, E.W. et al. Study of Thin Film Ferroelectric Superlattices. MRS Online Proceedings Library 433, 339–344 (1996). https://doi.org/10.1557/PROC-433-339

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  • DOI: https://doi.org/10.1557/PROC-433-339

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